Used KLA / TENCOR / PROMETRIX Omnimap RS-55TCA #9261757 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 9261757
Resistivity mapping system
Includes:
Computer
Monitor
Printer
Robot handler.
KLA / TENCOR / PROMETRIX Omnimap RS-55TCA Wafer Testing and Metrology equipment is designed to provide comprehensive defect physics characterization and analysis for semiconductor manufacturers. It integrates several technologies into a unified system to address wafer metrology processes for both production and research applications. The main features of the unit include: Tapping AFM (Atomic Force Microscopy): Allows for imaging and real-time measurement of nanostructures on the wafer surface with high resolution. RS-50 Raster: Provides high speed, non-contact metrology of the entire wafer surface, including the substrate, contact pads, and other features. STARFISH Edge Detection Machine: Automatically detects wafer edges in order to provide precise alignment information for subsequent imaging and measurement processes. Lateral Force Microscopy (LFM): Enables real-time mapping of the forces between a probe tip and the wafer surface with a resolution of 1 nanometer or less. Coaxial Probe Scanning: Coupled with LFM, this feature enables control of probe tip deflection in order to generate a precise topography map. FPD-JV1010 Deformable Mirror: Used to control the angle of incidence of a focused optical beam in real-time. This allows for simultaneous high speed imaging in multiple directions. Electrostatic Force Microscope (EFM): Enables nano-scale imaging and surface analysis in non-contact mode. "Wafer level" Fluidic Tool: Through adjustment of vacuum and pressure, as well as flap valves, this asset enables full stand-off control of fluid levels. This is used to accurately deliver fluids, such as polarizing solutions or fluids containing markers, to the wafer surface. VME Computer Based Data Acquisition & Control Model: Based on an industrial VME architecture, this computer allows for real-time control over instrument operations, as well as data collection. This wafer testing and metrology equipment provides a versatile, precise, and powerful platform for a wide range of characterization needs. With its advanced imaging capabilities, as well as its wide range of analysis options, KLA OMNIMAP RS-55/TCA is perfectly suited to both production and research applications.
There are no reviews yet