Used KLA / TENCOR / PROMETRIX Omnimap RS-75 #9163055 for sale
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ID: 9163055
Wafer Size: 8"
Resistivity mapping system, 8"
Automatic open cassette notch alignment
Dual loadport
Currently installed and stored in cleanroom.
KLA / TENCOR / PROMETRIX Omnimap RS-75 is a wafer testing and metrology equipment that allows for quick and accurate analysis of semiconductor wafers. The system consists of a wafer stage that can transport a semiconductor wafer up to a maximum size of 300mm. The unit is equipped with high performance optics (up to 400X magnification) and a variety of built-in sensors and inspection tools that allow for detailed inspection of the wafers. The machine is capable of measuring surface topography, surface flatness, resistivity, thickness, defect density, and other parameters. The RS-75 features two detection systems - focus detection and scatter detection. The focus detection tool utilizes a laser beam that is directed onto the wafer surface to measure surface irregularity heights to a resolution of 0.1 micron. The scatter detection asset utilizes laser light that is passed through the wafer and allows for automated inspection of the surface features. The model also includes a programmable, automated non-contact three-axis wafer stage. This allows for precise positioning of the wafer within the equipment for accurate testing and inspection. Additionally, the system is equipped with a high-speed image acquisition unit that can capture several thousand images per second for maximum testing accuracy. KLA Omnimap RS-75 supports the Auto Map software, which allows the user to pre-set measurement parameters and have the machine capture and analyze data accordingly. The tool also includes a fully programmable GUI-based user interface that allows for easy set-up and analysis of data. The asset is designed for maximum repeatability and accuracy for a variety of applications including wafer surface metrology, defect inspection, failure analysis, and more. Its advanced optics, efficient testing, and automated measurements make it an ideal choice for the most demanding semiconductor wafer testing applications.
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