Used KLA / TENCOR / PROMETRIX P-20H #9111707 for sale
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ID: 9111707
Wafer Size: 8"
Vintage: 1996
Surface profiler, 8"
Options: SECS / GEM
Wafer shape: Semi Notch No Flat (SNNF)
Cassette port
MIRAIAL KM-803P-K Wafer cassette, 8" PP
PC
Micro head 1 LF sensor
Open handler, 8"
STAR JR-100 Graphic printer
No SMIF
1996 vintage.
KLA / TENCOR / PROMETRIX P-20H Wafer Testing and Metrology Equipment is an automated, high precision metrology system, designed for a variety of critical wafer testing and metrology applications. The unit offers a sophisticated design and advanced software architecture that enables users to perform a variety of measurement tasks precisely and quickly. KLA P-20H utilizes a series of direct-drive stages, which deliver ultimate precision in surface and composite metrology measurements. The stages are equipped with lead screw and linear encoder/servomotors for high-speed, high resolution performance. The stages are also designed with a low center of gravity, which ensures reliable measurements with no drift. TENCOR P20H features a powerful image recognition machine and a state-of-the-art optical imaging capability. This complex integrated package of advanced technologies allows for the measurement of sample surfaces with greater accuracy and reliability. The tool can be configured with up to 6 cameras, which can provide superior edge recognition capabilities. The image acquisition and analysis processes are fully automated, which allows for faster sample measurement cycles and improved accuracy. P-20H is designed for a variety of sample sizes and shapes, including those with complex topographies. The asset enables a range of measurements, including critical dimension (CD), overlay, and other 3D metrology features. Additionally, the model is also designed for wafer-to-wafer and wafer-to-mask alignment measurements. KLA P20H offers a robust design and a variety of advanced features. It also provides three different measurement modes, such as static, high resolution, and low resolution. With the static mode, KLA / TENCOR / PROMETRIX P20H is capable of collecting data samples faster than other metrology solutions. In high resolution mode, the equipment can collect sample data with higher accuracy and repeatability. Lastly, in low resolution mode, the system provides a low-noise image with highly enhanced image quality. PROMETRIX P-20H is designed to provide real-time feedback on measurement results, as well a data archiving and report generation features. This unit also supports a wide selection of wafer testing and inspection processes. The combination of accuracy, reliability, high-speed performance, and advanced features make this an ideal solution for achieving precise wafer measurements.
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