Used KLA / TENCOR / PROMETRIX Quantox #9193136 for sale
Wafer measurement system Chuck: 8" Open cassette with BROOKS PRI single end effector robot handler Dual open cassette Measurement head: LD / CO Oven Signal tower UPS: No Hardware configuration: Load port: (2) Open cassette stations Quickmap head PDU FG1 / FG2 Facilities: Input power: 200 VAC +/-5%, 50/60 Hz Input vacuum: 610 mm Hg Input CDA: 75-100 PSI Input N2: 75-100 PSI Exhaust: 2000-4000 L/min Currently crated.
KLA / TENCOR / PROMETRIX Quantox is a fully integrated wafer testing and metrology equipment designed for use in production and R&D environments alike. Complete with a variety of powerful instruments, KLA Quantox provides comprehensive wafer metrology and testing capabilities. The system consists of a substrate holder, metrology tool, wafer inspection unit, and a computer control machine. The substrate holder is the base of the tool where polished wafers are placed for further processing. It is typically either an automated or manual loader, allowing for quick and accurate loading of the wafer into the machine. The metrology tool of TENCOR Quantox is a full-featured, micro-optical metrology asset. It uses an automated focus and magnification control model to measure up to four wafers simultaneously. Its powerful laser optics measure features on the wafer while its multi-segment optics provides automated fit and finish to ensure accurate measurements. The wafer inspection equipment is also a powerful tool. It utilizes a unique optical system to detect the presence of particles or other foreign objects on the wafer surface. It is also equipped with a variety of other detection technologies, such as X-ray, Electron Beam, or Fluorescence microscopy, to enable detailed analysis of wafer surfaces. The computer control unit of Quantox is designed to provide a robust and extensive control environment for maximum flexibility and ease of use. Its intuitive graphical user interface (GUI) features a comprehensive range of control options including process mapping, recipe data management, data analysis, and other specialized control functions. PROMETRIX Quantox is an extremely powerful and versatile wafer testing and metrology machine. Its features and performance make it the perfect choice for any production or research environment. It provides comprehensive wafer surface testing and analysis capabilities, keeping production costs low and ensuring consistent wafer yield results.
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