Used KLA / TENCOR / PROMETRIX RS-100 #168088 for sale

Name: KLA / TENCOR / PROMETRIX RS-100
Brand: KLA / TENCOR / PROMETRIX
SKU: 168088
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Wafer Testing And Metrology

Manufacturer

KLA / TENCOR / PROMETRIX

Model

RS-100

ID: 168088

Wafer Size: 8"-12"

Resistivity measurement system, 8"-12" Single open cassette station Hardware Configurations: Computer: P3 733MHz 256MB RAM 38GB Fixed hard-disk drive 17-inch color VGA monitor or flat-screen LCD CD-ROM drive 3.5-inch diskette drive, 1.44MB capacity Handler: 25 slots 12” wafer with 12" ASYST open cassette load port SBC: 486E Controller: ESC-218BT Rev. 4.0 Robot: ATM-407B-1-S-CE-S293 Finger Type: Single Fork Alignment System: Camera Factory Automation: E40, E94, E90, E87 Software Configurations: OS : Windows NT 4.00.1381 RS-100 Version 2.31.04 20051031 Debug 1.02a RS-100 Resistivity Tester Firmware Measurement Specifications: Measurement Range: 5m Ohm/sq - 5M Ohm/sq Absolute accuracy: ±1% of NIST certified range, based on NIST(NBS) standard wafers corrected to 23oC Measurement Repeatability: < 0.2% (1σ), based on KLA-Tencor’s “Probe Qualification Test”, 1 inch test diameter, using the appropriate probe head. Edge Exclusion: 1mm from edge of film, using the appropriate probe head. Temperature Accuracy: ±0.5°C Temperature Repeatability: ±0.2°C Measurement Capabilities: Routine check: 1-30 sites programmable XY map: up to 1,200 sites programmable Single or dual configuration capability Analysis Capabilities: Contour/3-D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites Probe qualification test: 20 sites, programmable radius Trend and SQC charts Histograms Calibration curves for low dose monitoring Throughput (5-site): 85WPH Data Transfer Capabilities: SECS-II, RS232 communication Enhanced SECS-II for fully automated operation Currently installed in cleanroom 2004 vintage.

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KLA / TENCOR / PROMETRIX RS-100 Wafer Testing and Metrology Equipment is a step forward in technology for the semiconductor industry, offering a dynamic and reliable experience that helps reduce time and cost associated with production processes. The system provides a unique combination of flexibility, accuracy, and speed, integrating navigation, inspection, and metrology tools into a single platform. KLA RS-100 operates by traveling over a wafer with an integrated navigation unit that maps out its exact location and measures the size, shape, and defect characteristics. This navigation is aided by a vision machine that reads a wafer's unique serials numbers and barcodes, which provides data tracking, analysis, and storage features. The tool is also equipped with a multi-sensor metrology technology for precise edge detection, flatness measurements, and critical dimension uniformity of material. The data collected by TENCOR RS100 enables engineers to identify and quantify defects on wafers quickly and accurately. The asset can detect a wide variety of defects such as scratches, bumps, and grit, as well as particles and particulate contaminant inclusions. It can also detect foreign matter, such as alkaline and acidic particles, light materials, and organic contaminants. Given this highly sensitive inspection capability, RS-100 has become the de facto model for verifying a wafer's cleanliness. The equipment is highly customizable and includes a variety of tools, such as a light source with multiple wavelengths and a high-resolution camera. PROMETRIX RS-100 is fitted with a range of measurements capabilities and can measure shape, size, and composition of wafer features. Engineers can acquire information on single and multiple wafers in a single run and use this data to make more informed decisions on how to optimize production processes. KLA RS100 is easy to use and incorporates a menu-driven touchscreen interface as well as a network scheduler. The high-quality feedback and traceable reports make production processes more efficient while allowing engineers to make rapid decisions based on data collected from each wafer. RS100 Wafer Testing and Metrology System is an innovative and reliable solution for the semiconductor industry. It offers a balance of detailed visual inspection, metrology, and automated data tracing capabilities for cost-effective quality control and efficient production.