Used KLA / TENCOR / PROMETRIX RS-100 #192556 for sale

Name: KLA / TENCOR / PROMETRIX RS-100
Brand: KLA / TENCOR / PROMETRIX
SKU: 192556
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Wafer Testing And Metrology

Manufacturer

KLA / TENCOR / PROMETRIX

Model

RS-100

ID: 192556

Vintage: 2004

Resistivity measurement system 300mm single FOUP handler Hardware Configurations Computer P3 733MHz 256MB RAM ◊ 38GB Fixed hard-disk drive 17-inch color VGA monitor or flat-screen LCD CD-ROM drive 3.5-inch diskette drive, 1.44MB capacity Handler 25 slots 12” wafer with 12" ASYST SMIF FL load port SBC: 486E Controller: ESC-218BT Rev. 4.0 Robot: ATM-407B-1-S-CE-S293 Finger Type: Single Fork Alignment System: Camera Factory Automation: E40, E94, E90, E87 Weight: 682 kg (1,500 lbs) Dimensions Height: 183.2 cm (73.1") Width: 134.2 cm (52.8") Depth: 175.3 cm (69.8") Software Configurations OS : Windows NT 4.00.1381 RS-100 Version 2.31.04 20051031 Debug 1.02a RS-100 Resistivity Tester Firmware Measurement Specifications Measurement Range: 5m Ohm/sq - 5M Ohm/sq Absolute accuracy: ±1% of NIST certified range, based on NIST(NBS) standard wafers corrected to 23oC Measurement Repeatability: < 0.2% (1σ), based on KLA-Tencor’s “Probe Qualification Test”, 1 inch test diameter, using the appropriate probe head. Edge Exclusion: 1mm from edge of film, using the appropriate probe head. Temperature Accuracy: ±0.5oC Temperature Repeatability: ±0.2oC Measurement Capabilities Routine check: 1-30 sites programmable XY map: up to 1,200 sites programmable Single or dual configuration capability Analysis Capabilities Contour/3-D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites • Probe qualification test: 20 sites, programmable radius Trend and SQC charts Histograms Calibration curves for low dose monitoring Throughput (5-site): 85WPH Data Transfer Capabilities SECS-II, RS232 communication Enhanced SECS-II for fully automated operation 2004 vintage.

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KLA / TENCOR / PROMETRIX RS-100 is a professional wafer testing and metrology equipment that offers detailed analysis of semiconductor wafers. This system combines the power and flexibility of KLA leading-edge wafer inspection and metrology technologies with the high-performance processing speed of TENCOR Axiom Advanced Process Control Suite. This comprehensive unit provides comprehensive characterization of wafer geometry, on-wafer defect and automatic metrology results, enabling customers to quickly respond to critical process control issues in the fab. KLA RS-100 leverages a sophisticated optical architecture to offer high-resolution imaging, fast data acquisition and low-noise imaging. It features a high-resolution digital camera and proprietary high numerical aperture optics designed for optimized wafer coverage and power detection. The integrated Zoom and Focus systems ensure a high resolution, low noise image for reliable data analysis in even the most challenging processes. The machine also supports double-patterning, EUV (Extreme Ultra Violet) scanner and etched-gate, as well as a wide variety of other processes. The tool utilizes the Axiom Advanced Process Control Suite from PROMETRIX to accurately analyze a variety of critical defect and metrology parameters, including pitch and pitch variation, OPC regime resistance, critical dimension, and depth of focus. All reported results are correlated to real-time process parameters, series and lot statistics and full characterization of the process over time. This information is utilized to provide insightful analyses and gain better control over the process, allowing users to identify process flaws and make the necessary adjustments efficiently and rapidly. In addition to standard statistical analysis, TENCOR RS100 offers advanced AI-driven strategies, allowing advanced detection and analysis of process trends, enabling process improvements and optimization. This asset enables users to establish and maintain automated process control programs by providing the data required to quickly set target values and feedback devices. Additionally, this model enables generating visual reports with dozens of charts presented in real-time and can be exported directly to multiple formats for easy data archiving and sharing. PROMETRIX RS-100 equipment is designed for cleanliness, reliability and low maintenance and features a user-friendly graphical interface for intuitive operation. This system is particularly ideal for customers who need to quickly respond to process failures, identify process issues and communicate quickly with the operations team. With KLA RS100, customers can rest-assured that their process is running efficiently and reliably.