Used KLA / TENCOR / PROMETRIX RS-100 #293610237 for sale

KLA / TENCOR / PROMETRIX RS-100 is an automated wafer testing and metrology equipment. It is used to inspect and measure the uniformity and electrical characteristics of semiconductor wafers and devices. KLA RS-100 utilises a patented Multiple Measurement Solutions (MMS) platform, which combines state-of-the-art wafer testing and metrology technologies such as Scanning Acoustic Microscopy (SAM), optical microscopy, and x-ray topography. TENCOR RS100 is designed for the efficient and accurate analysis of complex semiconductor device structures and materials. It is integrated with an advanced Automatic Defect Detection and Review (ADDR) system, which not only expedites on-board analysis but is also capable of detecting and locating nanometer-scale defects. The unit is also integrated with an advanced D-beam automated pattern recognition machine, which allows for precise wafer overlay measurement and control. TENCOR RS-100 features a number of automated testing and inspection capabilities that ensures uniformity, repeatability and accurate measurement of wafer characteristics. Its Multi-Zone Tracking feature automatically tracks wafer data and defects over multiple focal planes, while the Multi-Parameter measurements feature simultaneously calculates multiple parameters such as surface roughness, thickness, dopant concentration, Electron Microscopy (EMMI) - Pixel Analysis, and Uniformity. The tool also includes an automated drift compensation technology that monitors and compensates for mechanical distortions. The asset is equipped with a high speed x-ray imaging subsystem capable of measuring wafer uniformity and line width variations, a real-time imaging model for quickly locating defects, and a host of automated analytical tools for enhancing and improving wafer functionality. In addition, KLA RS100 features an optically aided alignment equipment that provides precision CCD alignment and optical characterization. PROMETRIX RS-100 system integrates seamlessly with existing hardware and software systems, and is available with optional software development tools for expanding its capabilities. Thus, by optimizing its integrated metrology and testing capabilities, RS100 ensures accurate and repeatable results for wafer development processes, enabling semiconductor device manufacturers to deliver high-quality, reliable products to the market.