Used KLA / TENCOR / PROMETRIX RS-100 #293628453 for sale

KLA / TENCOR / PROMETRIX RS-100
ID: 293628453
Resistivity mapping system.
KLA / TENCOR / PROMETRIX RS-100 is a powerful, yet versatile, wafer testing and metrology system. It utilizes advanced metrology technology that enables enhanced process control and data analysis, allowing for quicker and more accurate decisions in wafer processing. KLA RS-100 incorporates a compact design that is perfect for testing laboratories and tight spaces. Its space-efficient and modular architecture includes a high-resolution Optical Disovery System (ODS) that can be ordered in either a dual or quad configuration. This allows up to four specific measurements, such as CD, focus, notch, or overlay, to be taken simultaneously. Additionally, the large enough sample chamber of the ODS is ideal for inspecting larger samples with full range of illumination. TENCOR RS100's performance is further enhanced with the use of its advanced analytical algorithms, capable of seamlessly comparing patterns with variations in die sizes and a number of measurements. Its robust software capabilities also provide accuracy, speed, and flexibility in various measurement modes, including surface topography, profile, overlay, line-width, defect, and image analysis. It also offers superior overlay alignment, line width measurements, and other features that are difficult to accurately measure on a feature level. RS-100 boasts a number of features that make it a top choice for wafer testing and metrology. Its integrated optics offer superior repeatability and accuracy, while its automation capabilities enable quick and easy setup and operation. The ergonomic design includes a large touchscreen panel and user-friendly interface with built-in help functions that reduce setup time, provide guidance, and minimize user-error. It is also equipped with advanced illuminating capabilities such as fast dipolar and polar illumination, 4x electronic zooming, backlight with translucent optics, and integration with both thermal and ambient temperature controllers. In addition, KLA RS100 is compatible with KLA Data Acquisition and Analysis Software (DAS), letting users analyze data to identify process trends and perform more accurate data analysis. Overall, RS100 is an ideal choice for testing and metrology needs. It offers a range of features and capabilities that make it suitable for a variety of measurements, processes, and applications. With its modular design, superior optics, and analytical capabilities, TENCOR RS-100 offers accuracy and speed, making it an excellent choice for wafer testing and metrology.
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