Used KLA / TENCOR / PROMETRIX RS-100 #9206414 for sale

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ID: 9206414
Wafer Size: 8"-12"
Vintage: 2007
Resistivity measurement system, 8"-12" Tool has possible exposure to gold Dual FIMS loader Wafer shape: SNNF Computer unit Measurement unit includes: (2) Probe heads A&B Wafer handler: ASYST DFIMS 300 with ISO ports 2007 vintage.
KLA / TENCOR / PROMETRIX RS-100 from KLA is a high-performing wafer testing and metrology equipment that combines advanced metrology technologies with intuitive user interface elements. Its high throughput, accuracy and repeatability make it suitable for a range of demanding applications, including failure analysis, patterned wafer testing and optical defect inspection. At the core of KLA RS-100 is its sophisticated optics system, featuring a motorized Z-stage and height mapping array that allows for high-precision measurements of wafer properties while reducing measurement and positioning errors. The mechanics in this unit are designed to provide smooth operation, with low drift and vibration, and offer accuracy in the nanometer scale. In addition to its advanced optics machine, TENCOR RS100 is also equipped with a variety of tools for test and inspection. A light source array and imaging systems allow the tool to perform optical defect inspection, light source scanning, and backside wafer inspection tasks. An optical pattern recognition asset allows for identification of defects in wafers with complex patterns. A full suite of metrology tools is also included, providing measurements such as thickness, resistivity, sheet resistance, and sheet capacitance. TENCOR RS-100 includes an intuitive user interface that allows for easy operation. It includes an intelligent user guidance model, which automatically suggests the best test or inspection settings for the given application, as well as an automatic re-run option for failed tests. The intuitive nature of the user-interface also allows for the equipment to be operated with minimal training. Finally, RS100 system is designed to be expandable and customizable to meet the needs of a range of specific applications. Additional features such as multiple wafer stages and a variety of test fixtures are available that allow for the unit to be adapted for a range of tasks. Overall, PROMETRIX RS-100 is a highly customizable and expandable high-performance wafer testing and metrology machine. With advanced optics, comprehensive test and inspection capabilities, an intuitive user interface, and expandability, KLA RS100 is ideal for a range of demanding wafer metrology applications.
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