Used KLA / TENCOR / PROMETRIX RS-100 #9222500 for sale

KLA / TENCOR / PROMETRIX RS-100 is a high-end multi-sensor wafer testing and metrology system designed for inspecting semiconductor device structures. It is an integrated, in-line system capable of measuring, inspecting, and analyzing samples quickly and accurately. KLA RS-100 is equipped with three main components: an optical microscope, an interferometer, and a nanoscanner. The optical microscope is used to measure the shape, size, and topology of individual devices on the wafer. Its interferometer accurately measures wafer flatness and uniformity, while its nanoscanner can detect particles and other defects down to the nanometer scale. This powerful combination of sensors enables TENCOR RS100 to assess the quality of a wafer's surface texture and compare to standards. It also inspects for defects such as particle contamination, line width variations, step heights, contamination, contacts, and grains. RS100 provides a wide range of industrially accepted metrology methods, including laser-assisted confocal metrology, transmittance method, multiple reference points, and line-of-sight analysis. The integrated design and software enables automatic data collection and analysis capabilities. RS-100 includes a well-lit in-situ inspection environment and a high-resolution flat panel monitor with an intuitive graphical user interface. The system can be integrated with other KLA systems for additional functionality. PROMETRIX RS-100 provides reliable and repeatable results in wafer testing, metrology, and defect detection. Its integration capabilities and ease-of-use make it well-suited for production lines, research and development, and process qualification applications. It is compatible with a range of software platforms, such as TENCOR WaferMap, DBU, and Microsoft Windows.