Used KLA / TENCOR / PROMETRIX RS-35C #9266468 for sale

KLA / TENCOR / PROMETRIX RS-35C is a wafer testing and metrology equipment that is designed to enable automated testing and analysis of semiconductor wafers and devices. This system employs laser scanning, automatic defect recognition and classification, critical dimension (CD) measurements, and advanced defect analysis in order to profile and characterize semiconductor structures. KLA RS-35C unit utilizes a non-contact laser scanning microscope with variable incident angles to generate detailed topographical images of a device under test. This microscope is coupled with a multi-axis motorized stage for high speed, 360-degree automated wafer scanning. The machine's software-based intelligent defect detection algorithm performs extensive image analysis to detect, classify, and store defects. This intelligent defect detection algorithm is also capable of generating inspection reports with detailed metrics on defect distribution and yield evaluations. TENCOR RS 35C also features a powerful CD metrology capability, which includes fast and accurate measurements of line, space, and other miniature features of a device. This tool utilizes an optical video microscope and a high speed video image processing asset to rapidly measure and analyze CD features. Following CD measurements, the model's software provides comprehensive statistical analysis of CD measurements to monitor yield performance and trends. In addition to its CD metrology capabilities, RS-35C is equipped with advanced process control and faulty device analysis tools. It is equipped with a defect analyzer with enhanced red-light imaging and hardware-accelerated image processing capabilities to identify and analyze faulty devices. The analysis reports contain detailed defect metrics for process control, as well as device-level analysis for defective device analysis. Overall, RS 35C is a reliable and efficient wafer testing and metrology equipment that combines non-contact laser scanning, automated defect recognition, CD metrology, process control, and faulty device analysis in one platform. This system enables high speed and thorough inspection and analysis of semiconductor devices and wafers, helping to ensure reliable performance of sensitive semiconductor devices.