Used KLA / TENCOR / PROMETRIX RS-35C #9298820 for sale

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ID: 9298820
Wafer Size: 4"-8"
Resistivity mapping system, 4"-8" 4-Point Prober with printer 3D Mapping and contour Trend charts OmniMap collects Analyzes sheet Conductive layers: Conductive layers: Implants, diffusion, EPI, CVD, metals and bulk substrates Measurement: 5m ohms/sq to 5m ohms/sq on 2" to 8" Measures up to 1264 sites per wafer using standard or user-defined patterns Sheet resistance: Accurate Repeatable.
KLA / TENCOR / PROMETRIX RS-35C wafer testing and metrology equipment is an automated device that provides precise, repeatable, and accurate characterizations and analysis of various semiconductor wafer specimen. It features three functions: wafer testing, metrology, and uniformity measurements, which are all performed in a single platform. KLA RS-35C wafer testing involves monitoring a specimen's electrical characteristics such as DC, pulse, response time, dark current, and surface noise. This is accomplished by using the system's special probe card, along with the auxiliary circuitry of the Autostation 8, which provides power and signal conditioning for the test. The probe card is capable of performing test frequencies ranging from 30 kHz to 20 MHz, with a resolution of up to 1Ω. TENCOR RS 35C metrology unit measures a specimen's structural integrity and defect levels. Its Scanning Electron Microscope (SEM) allows image acquisition at high resolution and magnification, with automated feature recognition and analysis capabilities. The machine is equipped with a Variable Pressure SEM, which can measure both light and heavy deposit wafers. It is additionally capable of performing a variety of ectopattern measurements, such as slope, profile, and groove depth. Lastly, KLA RS 35C uniformity measurement tool allows for rapid measurement of a specimen's device parameters within a specific area of the device. This is achieved by using an advanced RGB pattern recognition asset, which is capable of isolating features such as junction leakage, junction breakdown, threshold voltage, and loop current. Overall, PROMETRIX RS-35C wafer testing and metrology model provides a reliable means of characterizing and analyzing semiconductor wafers. It combines three different processes into one compact device, thereby making it an ideal choice for a wide variety of applications. It offers an efficient way of measuring different characteristics of a specimen, making it an important tool for industrial laboratories and research facilities.
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