Used KLA / TENCOR / PROMETRIX RS-35C #9354234 for sale

KLA / TENCOR / PROMETRIX RS-35C
ID: 9354234
Resistivity mapping system.
KLA / TENCOR / PROMETRIX RS-35C is a critical, semiconductor wafer testing and metrology equipment. This highly precise system enables users to inspect and analyze wafers, which are thin discs of semiconductor materials used as a substrate in the fabrication of integrated circuits. KLA RS-35C boasts a number of key features, providing the highest level of wafer mapping, recognizing tiny patterns down to 30nm in size. Furthermore, the unit incorporates image-based classification, providing for superior defect detection capabilities. The high precision of TENCOR RS 35C makes it extremely useful for many applications such as metrology, defect review, wafer sorting, defect isolation and failure analysis. The imaging capabilities of the machine allow users to accurately map individual wafer features and to measure the feature sizes, enabling a detailed inspection and analysis of the wafers. This helps ensure that motion, defects, and contamination are identified before committing to committing to a production run. TENCOR RS-35C measures a wide variety of features, including wafer surface topography, along with combinations of height, CD/Width/space, and edge parameters. The tool also offers the ability to measure roughness, including mean, peak height, peak to valley distance, and area analysis. RS 35C utilizes an automated wafer handling asset, which allows for the successful handling of wafers through an entire process. Wafer-specific information is collected for subsequent measurement, and this enables the model to quickly identify and inspect incoming wafers. To further improve efficiency, the equipment can be configured for multiple wafers and process steps. The system is powered by a powerful open platform for data collection and analysis. Data are collected using multiple engineering measurement systems, providing users with real-time data. KLA / TENCOR / PROMETRIX RS 35C also uses a versatile SWIR (short-wave infrared) imaging unit, which allows quick defect analysis on the wafer surface. So, PROMETRIX RS 35C is a powerful and complex wafer testing and metrology machine. With multiple measurement systems, a powerful open platform, and an automated wafer handling tool, RS-35C provides unparalleled wafer mapping capabilities, defect detection and metrology. The abilities of KLA RS 35C make it an extremely valuable tool for wafer manufacturing, with its precision on wafer features and analyzation of defects allowing for the highest production yields and cost savings.
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