Used KLA / TENCOR / PROMETRIX RS-50 #9298896 for sale

KLA / TENCOR / PROMETRIX RS-50 is a wafer testing and metrology equipment designed for product development, process monitoring, failure analysis, and yield improvement. The system measures the topographical features and electrical properties of semiconductor wafers with high speed and precision. The unit combines automated optical and electrical metrology capabilities into a single platform. Its optical metrology capabilities utilize automated 3D Non-Contacting Interferometric microscopy (3D NCI) for fast, defect-free, non-destructive surface topography measurements. The machine's non-destructive electrical metrology capabilities include high-speed measurement of electric fields, resistivity, capacitance, and current leakage. KLA RS-50 is optimized for measuring a variety of semiconductor and dielelectric technologies including silicon-on-insulator (SOI), strained silicon, MEMS, and high-K dielectrics. The tool measures devices from 150mm to 700mm wafers, and features a table in which the substrate is placed, allowing for a repeatable set-up and improved accuracy. TENCOR RS-50 features a state-of-the-art image acquisition asset, which provides rapid scanning and automated stitching of wafer maps. It can acquire full-wafer images in 1-2 minutes, and has the capability for maskless and automated defect review, with a resolution adjustable up to 0.75μm. The model's 3D NCI technology provides high-resolution mapping of high-aspect-ratio features such as isolation trenches, contact openings, and polysilicon trenches. RS-50 provides metrology feedback for process control, enabling process engineers to make improvements to the current process or optimize new process recipes. The equipment's flexible architecture also allows it to adapt easily to changing technology and applications. PROMETRIX RS-50 offers users comprehensive electrical metrology capabilities, utilizing advanced techniques such as EBBED sheet resistance measurements, modulation spectroscopy, and 4-point sheet resistance measurements. It can measure contact resistance, MOS capacitors, and other electrical parameters, as well as measure small geometries down to 0.5μm. Overall, KLA / TENCOR / PROMETRIX RS-50 from KLA is an advanced wafer testing and metrology system that provides rapid and reliable measurements for product development, process monitoring, failure analysis, and yield improvement. The unit's automated optical and electrical metrology capabilities enable users to visualize surface topography, analyze electrical properties, and make changes to improve device performance and quality.