Used KLA / TENCOR / PROMETRIX RS-55/TC #293651524 for sale

KLA / TENCOR / PROMETRIX RS-55/TC is a state-of-the-art wafer testing and metrology equipment designed to provide high-resolution measurements in a wide range of semiconductor materials. The system can be used to detect and analyze defects on wafer surfaces, as well as for particle size and contamination measurement. KLA RS-55TC is built on a four-axis transverse stage, with the primary axes being at the left side, right side and center. This allows for a variety of sample positions and relative positioning, so that a large number of measurements can be simultaneously performed in a single wafer. It is also equipped with a two-stage high-precision XY translation stage, which is capable of accurately positioning the probe/sample within 10μm. The unit is also equipped with high-resolution optical and video microscopes, laser spotters, and an Out-of-Focus Detection (OOD) machine. The integrated microscopes provide a full field-of-view image, as well as magnifications up to 45x, enabling clear and detailed image acquisition for defect analysis. The laser spotter can determine the exact position of the defect on the sample, while the ODD tool is capable of quickly validating the actual dimension of the defect. The asset is powered by powerful metrology tools designed specifically for wafer-level analysis. The model's wide-field scanning optics are accompanied by high-speed data acquisition and analysis software to enable fast and accurate measurement of wafer-level surface features, such as crystal lattice structure, surface topography, thin films, and defects. The data analysis packages also enable the generation of parametric images and 3D surface roughness profiles, and provide accurate, high-resolution data of a wide variety of surface patterns and characteristics on semiconductor wafers. TENCOR RS55/TC is a highly reliable and flexible equipment, offering both high throughput and high accuracy. It is ideal for advanced applications, such as defect inspection and process control, as well as for process development and product qualification of semiconductor wafers. The system is also compliant with industry standards such as SEMI S2-97 (requiring two independent optical sensors), SEMI S8-99 and SEMI S14-96.