Used KLA / TENCOR / PROMETRIX RS-55/TC #293742667 for sale

KLA / TENCOR / PROMETRIX RS-55/TC is a state-of-the-art wafer testing and metrology equipment. It is designed to inspect and analyze wafers of all sizes and materials, from 6" to 300mm. The system can identify defects, from micro-dendrites to intra-layer defects, with high precision and accuracy. KLA RS-55TC utilizes standard and advanced image acquisition techniques such as Scanning Electron Microscopy (SEM), Optical Microscopy (OM) and Reflected Light Microscopy (RLM) to perform a variety of metrology and imaging measurements. The unit has automated wafer alignment and pre-alignment, which is ideal for high throughput and large wafer testing. The machine is equipped with a proprietary defect recognition algorithm, as well as a chemical mechanical polishing (CMP) analysis tool. The defect recognition algorithm is designed to detect and identify defects in semiconductor wafers with high accuracy and repeatability. The CMP analysis asset enables sophisticated surface profiling of wafer surfaces enabling continuous inspection of the chemical process over time. TENCOR RS55/TC wafer testing and metrology model includes a wide range of metrology inspection tools, software and visualization capabilities. The equipment allows users to quickly inspect a range of wafer types, such as SOI, SiN, SiON, photoresist and metal. The advanced visual inspection and analytics software provides users with information on defects, surfaces or material properties with precision. The system also includes various trusted production capabilities such as process monitoring and control, high speed sample rate and wafer exploration, defect classification and feature extraction, defect density systems, overlay and wafer alignment, statistical data review capabilities, multi-site mapping and defect analysis. With all of these features combined, TENCOR RS-55 / TC is able to provide high levels of accuracy and repeatability for a variety of wafer testing and metrology tasks.