Used KLA / TENCOR / PROMETRIX RS-55/TC #9013475 for sale
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ID: 9013475
Wafer Size: 4"-8"
Resistivity mapping system, 4"-8"
Vacuum: 500 mmHg
Pressure: 40-60 psig (3.3bar)
System computer: 486 / 33 MHz
Fixed hard drive: 110 MB
Removable disk: 44 MB
3.5" diskette drive: 1.44 MB
1994-2000 vintage.
KLA / TENCOR / PROMETRIX RS-55/TC is a high-precision, automated wafer testing and metrology equipment designed for advanced semiconductor packaging operations. This system provides the latest in automated testing capabilities, including manual and semi-automated scanning strategies for both individual and multiple die wafers, as well as an automated metrology function for inspecting specific features within a device. This unit features a long-travel X, Y and Z stage, and advanced scanning algorithms designed to improve the accuracy and speed of testing. KLA RS-55TC can measure and test a wide range of die and wafer properties, including but not limited to: yield, defects, and other device characteristics. Additionally, the machine is capable of performing secondary operations such as reflectance, film thickness, and wafer flatness measurements. TENCOR RS55/TC tool offers an intuitive user interface which makes operation and maintenance simple and straightforward. The asset is also capable of translating between the GDSII and tape formats, creating a flexible and cost-effective platform for die testing and metrology. The model also features a variety of calibration options in order to ensure accuracy for a wide range of measurements. Overall, RS 55/TC is an ideal equipment for advanced wafer testing and metrology operations. It provides highly accurate and detailed measurements on a wide range of wafers, enabling device makers to improve process control and create higher quality products. Additionally, its intuitive user interface and flexible calibration options make it straightforward to operate and maintain.
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