Used KLA / TENCOR / PROMETRIX RS-55/TC #9077700 for sale
Wafer Size: 8"
Resistivity Mapping System, 8" Measurement Specifications: Measurement range: <3m/sq to >5M/sq Absolute accuracy: based on NIST (NBS) standard Measurement repeatability Edge exclusion: 3mm 25mil probe head/ 4mm with 40mil probe head / 5mm with 62.5mil probe head Temperature 1999 vintage.
KLA / TENCOR / PROMETRIX RS-55/TC is a sophisticated wafer testing and metrology equipment that is tailored for the semiconductor industry. It is utilised to inspect and measure device-level semiconductor wafers quickly and accurately. This system has the capacity to analyse a wide range of wafer attributes, including die size, die pitch, active area, defect density, device profile, line widths, and feature size uniformity. KLA RS-55TC unit features a precision robotics stage and advanced sensors that allow for high-speed measurements. It can process wafers up to 8 inches in diameter at throughput levels greater than 1,500 wpm. The machine is equipped with an automated wafer mapper and a variety of measurement or inspection tools, including CCD TV cameras, capacitive probes, scanning electron microscopes, and interferometers all incorporated into a single modular platform. TENCOR RS55/TC tool provides a variety of metrology related capabilities, including die-level measurements, die-to-die measurement, or die-to-map comparison; defect detection and classification; device profiling; cross sectional analysis; 3D image analysis; and image-based failure analysis. It can also perform a wide range of inline process control functions, including process monitoring, real-time defect detection, and yield screening. PROMETRIX RS-55/TC boasts a state-of-the-art controller, which significantly improves performance and accuracy. The controller is highly accurate, and features a modular design that allows for an easy expansion of asset capabilities. It is also equipped with a sophisticated data collection and storage model, which provides comprehensive review, data mining and reporting capabilities. PROMETRIX RS 55/TC is a powerful, versatile and reliable wafer testing and metrology solution that combines the very best in automated testing technology and precision measurement tools. It guarantees reliable, repeatable and consistent testing and results, helping to ensure the production of high-quality semiconductor devices.
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