Used KLA / TENCOR / PROMETRIX RS-55 #293607040 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

KLA / TENCOR / PROMETRIX RS-55
Sold
ID: 293607040
Wafer Size: 6"
Resistivity mapping system, 6" Resistivity probe: Sensing signal transmission and control system Wafer diameter, 4"-8" Measurement range: 5 m Ohm/sq to 5 M Ohm/sq Absolute accuracy: ±1% (Standard silicon wafer, 23°C) Measurement repeatability: <0.2% Measurement time: ≤ 60 Seconds (49-Point test, manual loading, single wafer, temperature compensation) Controller: Computer SECS Communication interface Inspection table stage: X-Y Direction: >200 mm Z Axis control Servo motor drive Transmission / Transfer: Fully automatic cassette to cassette Robot Alignment.
KLA / TENCOR / PROMETRIX RS-55 is a fully automated, semiconductor wafer testing, measurement, and metrology platform tailored to advanced packaging, MEMS, and other high performance, complex structures. Built from the ground up to excel in a wide variety of test and measurement applications, KLA RS55 provides industry-leading accuracy, repeatability and availability. Fast and accurate, TENCOR RS 55 is capable of measuring a wide range of features, including line widths, conductor sizes, and through-silicon vias (TSVs). Furthermore, the platform is able to measure a variety of packages, including chip scale packages (CSPs), WLCSPs (wafer level chip scale packages), and flip chips, as well as a variety of ICs and PCBs. TENCOR RS55 offers various imaging options, such as reflective, brightfield, and darkfield, allowing for 3D metrology imaging. Additionally, its advanced user interface, and intuitive measurement software, simplifies and speeds up data collection, analysis and reporting. For enhanced accuracy, KLA / TENCOR / PROMETRIX RS 55 also features an Integrated Digital Image Correlation (IDIC) system for die-level analysis, as well as proprietary Coldfield™ and Brightfield™ imaging systems for unmatched low-light performance and improved image quality. Additionally, TENCOR RS-55 incorporates an extended depth of field module for high performance static metrology applications. For advanced metrology applications, KLA RS 55 includes an integrated interferometer system with automated alignment and stability. Through the powerful PROFINET/NET system and APIs, RS55 can be connected to various external devices, and complex measurements can be performed in-situ. With its four integrated dual-axis stages, the platform enables automated component placement, element alignment, and wafer mapping. RS-55 features six different systems, each designed to meet the highest standards of quality and precision, offering a wide range of resolution and speed capabilities. KLA / TENCOR / PROMETRIX RS55 is ideal for a variety of process steps, enabling customers to maximize throughput and scalability while minimizing yield loss.
There are no reviews yet