Used KLA / TENCOR / PROMETRIX RS-55 #293778052 for sale
URL successfully copied!
KLA / TENCOR / PROMETRIX RS-55 is a professional-grade wafer testing and metrology equipment designed for advanced failure analysis. It has the capability to test up to three wafers simultaneously and deliver comprehensive data about their parameters, such as defects, thickness, backside cleanliness and potential contamination, planarity and flatness, thickness uniformity and surface roughness. Among its features, this system is equipped with two high-powered vacuum scanners. Adopting a swing-bar design, one adjusts the stage tilt while the other adjusts the standoff distance. This permits accurate scanning of the entire area of most wafers. KLA RS55 also contains a high-frequency focus control, which provides precision focusing of the measured surface. In addition, TENCOR RS 55 features an X-Y stage unit, which facilitates wafer positioning and scanning. This allows rapid adjustment of the scanning area while permitting accurate alignment of the testing equipment with the wafer's center. It also controls z-motion, which helps maintain an ideal standoff between the wafer and the testing equipment. KLA RS 55 also supports a wide range of testing and analysis tasks, such as FPRA (Fourier Power Reflectometer Analysis), NGR (Non-Gaussian Reflectivity) and contour profiling. It can also be used to measure defects from 0.2nm to 1mm in size. Its advanced image processing enables TENCOR RS-55 to accurately detect and classify defects by size, shape, location and phase. RS 55 is equipped with a Prober Interface, which allows for precise control of wafer handling and the measurement of temperature-sensitive parameters. The machine also features fully automated testing and data display, which allows the user to define testing parameters, maximize throughput and monitor testing results in real time. Equipped with all these features, TENCOR RS55 provides precise, reliable and comprehensive data about the parameters of any given wafer. This makes it an indispensable tool for advanced failure analysis and process control.
There are no reviews yet