Used KLA / TENCOR / PROMETRIX RS-55 #9258171 for sale

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ID: 9258171
Resistivity mapping system.
KLA / TENCOR / PROMETRIX RS-55 is a cutting-edge wafer testing and metrology equipment designed for semiconductor manufacturers. It uses automated optical inspection (AOI) with advanced algorithms to detect defects in wafer surfaces, such as particles, cracks, scratches, voids, and small pits, at resolutions down to 50 nanometers. It is integrated with KLA 5x SEM imaging system and provides full-wafer metrology capabilities, including topography, wafer curvature, surface mapping, overlay, and pattern measurement. KLA RS55 is built with robust hardware and software components that enable it to remain reliable in the harshest production environments. Its camera and microscope unit uses state-of-the-art imaging optics and image processing algorithms to collect high-resolution images that enable a wide variety of defect inspection applications. TENCOR RS 55 is equipped with intelligent software that automates and participates in the wafer process from start to finish. The platform's advanced algorithms, such as ScreenOverlay, provide precise merging and mapping of wafer data across multiple wafers onto the same area. It also has a user-friendly graphical user interface (GUI) that enables operators to quickly set up and control wafer tests and metrology. PROMETRIX RS-55's easy-to-use and powerful measurement capabilities enable fast and accurate defect-detection at the finest resolution. Additionally, its 8-bit and 32-bit measurements allow for the detection of small particles and other micro-level defects. Its analysis functions enable quick and accurate inspection of line edge and line width attributes to characterize lithography processes. The machine includes the LinkClean non-contact cleaning tool for wafer cleaning between inspections, or for remote cleaning of dirt or fine particles. KLA RS-55 supports various cleaning strategies, including laser or chemical / by immersion delivery models, for surface contamination cleaning. KLA / TENCOR / PROMETRIX RS55 provides reliable wafer testing and metrology for high-performance process control and improved yield management. Its high-precision optical imaging, advanced algorithms, easy-to-use GUI, and comprehensive cleaning options make it the ideal choice for semiconductor manufacturers.
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