Used KLA / TENCOR / PROMETRIX RS-55 #9265521 for sale

KLA / TENCOR / PROMETRIX RS-55
ID: 9265521
Wafer Size: 8"
Four point probe resistivity mapping system, 8".
KLA / TENCOR / PROMETRIX RS-55 is a wafer testing and metrology equipment designed to meet the needs of the semiconductor industry. It can be used to analyze wafer surfaces and measure their electrical characteristics. KLA RS55 provides advanced advanced optical, resistive, and capacitive metrology capabilities in a single system alleviating the need for multiple test systems. This high performance unit is extremely precise and efficient in its data acquisition, analysis, and speed, all while providing reliable data quality. The machine is designed with a 4-axis motorized XYZ stage that can accommodate wafers as large as 300mm in diameter. This allows for wafer topography mapping and the ability to measure small distance variations with sub-nanometer accuracy. It also includes a 4 quadrant wafer chuck that eliminates the need to manually rotate the sample for image acquisition. TENCOR RS 55 has a laser optical scattering tool that is calibrated to measure resistive and capacitive parameters with high accuracy. The asset is outfitted with a pulsed interferometer located inside the optical column that acts as a reference beam to detect very small surface profile and roughness variations. This measurement feature makes the model ideal for many of the process steps of integrated circuit fabrication. The software of PROMETRIX RS-55 is easy to program and provides comprehensive analysis and outcome calculations. Additionally, RS55 is capable of rendering high-resolution images of wafers and performing statistical analysis on them for evaluating semiconductor processes. The equipment can also be integrated with additional software tools for automated wafer testing and metrology. Overall, KLA RS 55 is a advanced and reliable wafer testing and metrology system that is designed to meet the demanding needs of the semiconductor industry. It provides high-precision metrology capabilities with unparalleled accuracy, efficient data acquisition with reliable reporting, and rich software with intuitive user interface. This makes it the perfect testing and metrology unit for any semiconductor manufacturer.
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