Used KLA / TENCOR / PROMETRIX RS-55TCA #9281547 for sale

KLA / TENCOR / PROMETRIX RS-55TCA is a state of the art wafer testing and metrology equipment devised to provide comprehensive metrology solutions for the characterization of advanced wafer and chip designs. It is an integrated system, equipped with several features to provide complete analytics and performance evaluation for wafer designs of various heights. KLA RS 55 TCA employs advanced laser-based technologies for defect inspection. Laser-based technologies used by the unit are Compact Dual Mode (CDM) imaging machine for bright field, dark field, color metrology, as well as optional CDM in-line overlay measurements to detect smaller defects. Additionally, several automated non-laser optical designs tools such as optical brightfield and darkfield, metrology and overlay can be included in the tool. The dual-view optical asset enables simultaneous defect inspection and overlay metrology measurements at several wafer sites. The model has a maximum field of view of up to 500mm in X-Y axes, and a maximum working distance of 4-5mm. It is able to distinguish and measure defects as small as 0.25μm from the substrate surface. Other features of the equipment include a high-speed line scan Mode and broad Mura measurement range with dedicated signal processing algorithms. The system is powered by high-speed image analysis frameworks, enabling faster image process times by reducing computer loads. It is supported by a uniquely designed, integrated wafer input/output automation unit which facilitates high throughput. In addition to its hardware features, TENCOR RS-55/TCA is outfitted with an advanced software package that provides analysis and monitoring features as well as a user-friendly interface. The software can provide comprehensive reports on a process cycle, including defect maps, trend graphs, and defect management/statistical process control (SPC). The software-driven machine enables efficient data collection to help identify, prioritize, and reduce quality and yield losses. PROMETRIX RS-55 TCA is a comprehensive and cost-effective solution for comprehensive testing and metrology of advanced wafers and chips. It offers reliable performance and provides end-to-end analysis for a complete evaluation cycle.