Used KLA / TENCOR / PROMETRIX RS-55TCA #9284327 for sale

KLA / TENCOR / PROMETRIX RS-55TCA
ID: 9284327
Resistivity mapping system.
KLA / TENCOR / PROMETRIX RS-55TCA is a fast, sophisticated wafer testing and metrology equipment designed for use in semiconductor fabrication. It combines high-resolution, automated imaging with semi-automated measurements, allowing detailed analysis and assessment of semiconductor wafers with excellent repeatability and accuracy. KLA RS 55 TCA is equipped with an overhead telecentric optics system that can accommodate wafers up to 8 inches in size. The unit enables high-precision imaging of the test wafer including both microscopic and macroscopic features, as well as 3D depth profiling with scanning electron microscopy (SEM) capability. This integrated imaging machine provides image resolution deviations as small as 0.5 microns. The high-resolution imaging tool allows users to detect nanoscale defects, thin film thickness, and critical parameter measurements. Automated measurements such as overlay, focus and repeatability, spectroscopic comparison, defect detection, pattern matching, and etch depth are all enabled by TENCOR RS-55/TCA's metrology capabilities. Additionally, KLA RS-55 TCA comes with advanced software designed for automated analysis and reporting of inspection results. The software is capable of controlling the asset instrumentation, measuring parameters, and generating reports with a variety of formats. For example, the software is equipped with statistical process control (SPC) and problem-solving tools, as well as customizable mask limit databases. Finally, TENCOR RS-55 TCA features a climate-controlled operation that enables it to maintain impeccable temperatures and low fluctuations to ensure the highest level of accuracy and repeatability of results, even when operating with several wafers running simultaneously. PROMETRIX RS 55 TCA is a powerful and reliable wafer testing and metrology model that provides precision imaging and measurement capabilities with top-class accuracy and repeatability. It is an ideal solution for semiconductor fabrication and testing applications that require high-resolution imaging and fast turnaround times.
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