Used KLA / TENCOR / PROMETRIX RS-55TCA #9293260 for sale

KLA / TENCOR / PROMETRIX RS-55TCA
ID: 9293260
Resistivity mapping system.
KLA / TENCOR / PROMETRIX RS-55TCA is a high precision wafer testing and metrology system specifically designed for advanced process control in semiconductor production environments. It combines advanced automated defect detection and classification capabilities with full 3D topographical mapping and resistivity analysis. KLA RS 55 TCA's automated imaging optics provide a wide field of view at high resolution to ensure superior detection and classification capabilities. The system has a patented, innovative auto-focus capability in which images are continuously evaluated and corrections are made to the imaging lens to ensure maximum-sharpness and image fidelity. It also incorporates dynamic mapping technology for high-precision topographical mapping. TENCOR RS-55/TCA is capable of detecting nanoscale defects with unsurpassed accuracy and reliability. Its patented defect classification system utilizes probabilistic techniques to rapidly detect and classify complex defects with confidence. This ensures that only significant defects are reported. It is also capable of advanced defect analysis, including 3D optical profilometry and electrical measurements, allowing for the measurement of properties such as etch depth and resistivity. KLA RS-55TCA offers traceability and reproducibility through its sophisticated software architecture. Its multiple recipes and fully-automated imaging and metrology processes allow operators to quickly set up and test a range of devices. This results in increased throughput, lower defect rates and improved manufacturing yield. RS-55TCA has a modular design and is open-architecture, allowing it to easily be integrated into other production processes as well as robotic systems. Its robust, modular construction and superior mechanical build quality guarantee performance in harsh industrial environments. Combined with KLA world-class application specific software, RS-55 TCA provides a total solution for wafer testing and metrology.
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