Used KLA / TENCOR / PROMETRIX RS-55TCA #9300181 for sale

KLA / TENCOR / PROMETRIX RS-55TCA
ID: 9300181
Resistivity mapping system.
KLA / TENCOR / PROMETRIX RS-55TCA is an advanced wafer testing and metrology equipment that provides integrated metrology and defect review of integrated circuits and thin film structures on wafers. KLA RS 55 TCA is the result of the integration of KLA proven metrology and defect review capabilities and the patented TENCOR wafer testing process. The integration of these two processes into TENCOR RS-55/TCA ensures high quality metrology and fast, reliable defect identification. The system is equipped with a high-precision optical microscope with laser autofocus unit, an automated image processing subsystem and a scanning electron microscope (SEM) that can identify both surface and subsurface defects. The machine also provides real-time defect inspection and review capabilities. The optics can image structures down to feature sizes of 0.1 microns. RS-55TCA includes a wide range of imaging features such as die or test chip identification, automatic focus parameter adjustment, lowest contrast and threshold control, real-time defect size and defect area measurement, defect size distribution analysis, histogram analysis, pattern recognition of different types of defects, and automatic report generation. It also provides automated and interactive wafer review modes, allowing users to quickly view and analyze defects on a wafer or sub-wafer level. The tool is designed to operate in a cleanroom environment, but is also capable of operating in a range of temperature, humidity and pressure ranges. This adaptive capability makes the asset ideal for a wide range of industry applications. The main benefit of KLA RS-55TCA model is its ability to quickly identify and analyze defects on a wafer by combining PROMETRIX well-known metrology and defect review capabilities with its high precision optical and SEM imaging technologies. As a result, users can expect faster and more accurate process control and improved yields. Additionally, the equipment can reduce the time-to-market and improve customer satisfaction.
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