Used KLA / TENCOR / PROMETRIX RS-55TCA #9312925 for sale

KLA / TENCOR / PROMETRIX RS-55TCA
ID: 9312925
Vintage: 1994
Resistivity mapping system 1994 vintage.
KLA / TENCOR / PROMETRIX RS-55TCA is a wafer testing and metrology equipment specifically designed to meet the complex requirements of the semiconductor industry. This system leverages the latest advances in optics and lasers, enabling high-speed, non-contact scanning of wafer surfaces. It accurately measures device parameters such as dopant depth, defect size, resistivity, etch depths, scratch depths and SEM parameters. The unit is capable of inspecting the wafer up to 500x faster than the nearest conventional scanning machine. Its flexibility allows for high throughput and repeatable measurements, irrespective of wafer size. It also comes with integrated surface analysis, process monitoring, defect detection, and metrology software. KLA RS 55 TCA utilizes a wide field of view for maximum measurement accuracy. It incorporates an advanced near-field imaging capability, providing an insight into subnanometer structures on the wafer. Additionally, it has a visioning and imaging light source for wafer inspection. The vision tool has a pixel resolution of 30μm, allowing for fast and reliable analysis of critical wafer characteristics. TENCOR RS-55/TCA is a fully automated asset. It utilizes a fully integrated robot and vision model, allowing for uninterrupted and collimated scanning of wafers. The equipment allows for hundreds of wafer measurements simultaneously and is capable of measuring up to 1000 wafers in an hour. The system can evaluate cleanliness, surface finish, and contamination levels. Additionally, the visual power is adjustable to accommodate various wafer sizes, including the smallest chips. PROMETRIX RS-55/TCA has built-in software and data analysis tools with fully standard-compliant protocols. Its software provides for automated feature recognition, fault isolation, and statistical data trending. Further, this unit offers the intelligence necessary for automation and operation at high levels of accuracy. TENCOR RS-55TCA is designed for examination, measurements, and data logging of three-dimensional optical surfaces. It assists in gaining a complete understanding of the wafer and its critical parameters for making optimal adjustments for yield optimization. All in all, PROMETRIX RS 55 TCA is the ideal wafer testing and metrology machine for today's rapidly changing semiconductor industry.
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