Used KLA / TENCOR / PROMETRIX RS-75/TC #179989 for sale

Name: KLA / TENCOR / PROMETRIX RS-75/TC
Brand: KLA / TENCOR / PROMETRIX
SKU: 179989
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Wafer Testing And Metrology

Manufacturer

KLA / TENCOR / PROMETRIX

Model

RS-75/TC

ID: 179989

Resistivity mapping system, 8" Hardware Configurations: Handler Type: H2 handler, with two open cassette platens, it can be attached with ASYST Load port for SMIF fab Computer: 486/66 MHz SW(StatTrax) Version : ST-6.70 Probe Head: x1 (Probe head type is optional depends on request) Standard User interface - Monitor, Keyboard, trackball Standard Media : Floppy Disk(1.44M) Measurement Specifications: Measurement Range: 5m Ohm/sq - 5M Ohm/sq Absolute accuracy: ±1% of NIST certified range, based on NIST(NBS) standard wafers corrected to 23oC Measurement Repeatability: < 0.2% (1σ), based on KLA-Tencor’s “Probe Qualification Test”, 1 inch test diameter, using the appropriate probe head. Temperature Accuracy: ±0.5oC Temperature Repeatability: ±0.2oC Measurement Capabilities: Routine check: 1-30 sites programmable XY map: up to 1,200 sites programmable Single or dual configuration capability All standard wafer sizes: 100, 125, 150 and 200 mm Analysis Capabilities: Contour/3-D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites Probe qualification test: 20 sites, programmable radius Trend and SQC charts Histograms Calibration curves for low dose monitoring Data Transfer Capabilities: SECS-II, RS232 communication Enhanced SECS-II for fully automated operation (optional) 1996 vintage.

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KLA / TENCOR / PROMETRIX RS-75/TC is a packaged wafer testing and metrology equipment designed for fast, high-precision studies of semiconductor devices, circuits, and related technologies. It provides automated optical inspection (AOI) and critical dimension (CD) measurements with sub-micron accuracy. The system is built on a robust frame that allows simultaneous AOI and CD measurements, enabling fast device characterization accuracies. KLA RS75/TC delivers high resolution metrology data via a dedicated optical head that features a motorized motorized tray and search lens, allowing quick and precise scanning capabilities. Using advanced telescopic and automated viewing methods, the unit can precisely detect, measure, and analyze defects and CD parameters depending on customer requirements. The auto-calibration feature optimizes optical performance based on wafer type and user-defined parameters. The integrated, proprietary advanced 3D-analysis software suite includes powerful inverse optical, CD and GQA tools for comprehensive, comprehensive metrology and defect analysis. The software conveniently integrates with many leading wafer ecology models, simplifying health and risk assessment analyses while ensuring accurate, consistent results. TENCOR RS-75TC features an intuitive user interface which allows efficient control of optical alignment and sampling parameters, allowing defects and CD measurements to be reliably achieved in a single scan. The colorfully lit, controlled environment ensures brightness levels remain consistent, allowing optimal visual and defect detection. In addition, PROMETRIX RS-75TC offers a range of user-friendly features that help streamline data collection and analysis. It allows for the replication and sharing of wafer recipes, transportable scanning tracks, and reviewing of multiple defect properties at once. Further, its 'Analysis Report Table' provides customers with an easily programmable reporting tool, allowing them to export data in .csv or .xls formats in a single experiment. KLA RS-75 / TC is the perfect tool for advanced wafer testing and metrology for a wide range of semiconductor devices, circuits, and technologies. It offers complete control of optical alignment, sampling parameters, and automated defect inspection, giving customers the power to reliably study their devices while ensuring accuracy and consistency. Its advanced features and intuitive user interface make the machine simple to use, allowing customers to have a powerful, fast, and highly accurate metrology tool in the palm of their hands.