Used KLA / TENCOR / PROMETRIX RS-75 #293745457 for sale

KLA / TENCOR / PROMETRIX RS-75 wafer testing and metrology equipment is a high-performance, fully automated tool for the inspection and analysis of device parameters in semiconductor equipment. It offers a wide range of advanced capabilities to aid in the characterization, validation, and quality control processes. KLA RS75 offers an all-in-one solution featuring a high resolution imaging station with inspection, reflex inspection, and IV curves, an advanced metrology system, and powerful data analysis tools. The imaging station utilizes digital image correlation (DIC) technology to enable true 3D high-resolution imaging that can be used for high-resolution defect and critical dimension (CD) inspection. The reflex inspection unit on TENCOR RS 75 is designed to detect optical interference such as particles, line-edge roughness, and other non-uniformity factors that can affect device performance. The machine also provides advanced statistical (SPC) and on-the-spot defect analytics to detect aberrant patterns that can indicate greater issues. Along with the imaging and reflex capabilities, RS-75 features a powerful metrology tool for the accurate measurement of device parameters. This includes leading-edge edge placement accuracy (EPA) and process control capability (PC-C) and a high-speed multi-chip metrology asset for volume measurement and process control. The metrology model also includes a variety of film thickness measurement features and data analysis capabilities for a range of wafer types and technologies. Finally, the equipment is equipped with a comprehensive data analysis suite that has the advanced tools to analyze both the imaging and the metrology data available. This suite of tools combines powerful visualization with comprehensive statistical data and feature analysis, enabling users to rapidly identify local and global process trends. With its powerful, integrated capabilities, PROMETRIX RS 75 wafer testing and metrology system is an ideal solution for modern semiconductor characterizations, validation, and quality control processes.