Used KLA / TENCOR / PROMETRIX RS-75 #9097164 for sale
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ID: 9097164
Vintage: 1998
Resistivity measurement system
C to C type
Currently stored in a cleanroom
1998 vintage.
KLA / TENCOR / PROMETRIX RS-75 is a wafer testing and metrology equipment that offers superior surface inspection and defect detection capabilities for the semiconductor industry. This system is the ideal solution for the production testing of wafers, providing users with reliable and accurate test results. KLA RS75 features a wafer-handling platform which supports up to 5-inch wafers up to 6-inches in size. This enables the unit to be used in a range of product test configurations. The wafer is inspected using a combination of optical and electrical techniques. A 4-inch by 4-inch imaging array is used for optical imaging of the wafers and electrical testing uses specific sensor configurations to detect product and process failures. TENCOR RS 75 utilizes automated data acquisition techniques, with wafer surface imaging and reliability testing provided in a single pass. The machine's performance is optimized by its high-performance image processing algorithms, enabling reliable sensitivity in a range of applications. This includes scanning for surface topology defects, contamination, deposits, and voids, as well as device failure analysis. The tool also supports a wide range of defect measurements, such as defect height, defect pitch, depth of defects, and defect min/max dimensions. The asset is integrated with a robotic arm for wafer handling and can be used for wafer inspection and metrology. The robotic arm has a precision movement range of +/-0.02 millimeters and can reach surrounding devices for lithography and yield management. Furthermore, the model's repeatability and precision specifies a maximum of +/-0.1 millimeters when measuring on a 0.2-micron level. RS75 also features advanced hardware and software control systems to ensure the equipment remains stable throughout the entire process. This includes a data acquisition speed of 42 milliseconds per pixel, manual and automatic image capture, and advanced waveform processing capabilities. Furthermore, the system can be linked to other systems to support real-time analysis and datalogging of measurement results. PROMETRIX RS-75 is the ideal solution for semiconductor production testing, providing reliable, accurate, and repeatable results. With advanced hardware and software control systems, this unit offers superior surface inspection and defect detection capabilities to ensure the highest quality results.
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