Used KLA / TENCOR / PROMETRIX RS-75 #9153014 for sale
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ID: 9153014
Wafer Size: 2"-8"
Vintage: 1996
Resistivity mapping system, 2"-8"
Handler:
Desktop
Without wafer transfer handler
Pentium Pro 150 MHz Computer
64M DRAM
High resolution LCD color monitor, 15"
Hard Disk Drive (HDD): 200M
Diskette drive, 3.5"
Capacity: 1.44 MB
Data transfer: SECS II / RS232 Communication
Measurement capabilities:
Routine check: 1-30 Sites programmable (ASTM Standard tests included)
Contour / 3-D Map, diameter scan: 49, 81, 121, 225, 361, 441, 625 Sites
XY Map: Up to 1200 sites programmable
Probe qualification: 20 Sites
Single / Dual configuration options
Analysis capabilities:
Contour, XY Die, 3-D surface maps
Diameter scan
Trend charts
SQC Charts
Histograms
Probe qualification procedure
File editing and data extraction capability
Calibration curves for low-dose monitoring
Average, difference and ratio maps
Measurement specifications:
Range: 5 mΩ/sq - 5 mΩ/sq
Typical measurement time: 1.2 sec per test site
Based on NIST (NBS) standard wafers corrected to 23°C
Repeatability: <0.2% (1 Sigma)
1996 vintage.
KLA / TENCOR / PROMETRIX RS-75 is a high-precision wafer testing and metrology equipment. The system has an advanced measurement accuracy of 0.2 nanometers, making it ideal for wafer characterization needs. It also provides imaging capabilities for both flat and 3D shape measurements. The unit is comprised of a powerful software package designed to manage all the different components, allow users to configure their machine settings, and to integrate with KLA advanced metrology and test solutions. The software suite consists of various modules that allow users to make calibrations, analyze data, and create reports. KLA RS75 is equipped with a proprietary vision tool, which includes an integrated focus tuner providing automated focus adjustment and optimized camera exposure control. This sensor utilizes a high-resolution 2048-by-1536 photosite array to capture images of the specimen. Additionally, it has an advanced autofocus asset, which allows the model to automatically adjust the focus plane while the specimen is being presented to the vision equipment. TENCOR RS 75 is also integrated with an automated auto-sampling feature which allows users to rapidly switch between wafer measurements. By using a high-resolution ASIC and a high-speed motor, the system allows specimens to move at speeds of 1,000 mm/second. This enables users to minimize testing timeline and maximize output. The unit comes with a variety of probes and sensors. Timedelay integration (TDI) provides a critical non-contact measurement capability of maximum amounts to measure height, width, and depth of a feature. It also has a variable optics machine that allows users to adjust the zoom magnification of the images captured by the TDI tool, providing a detailed 3D image. In addition, the asset also includes a wide variety of vision systems for applications ranging from mapping to edge detection. It also has a wide variety of inspection tools, ranging from end-of-line testing to wafer defect detection. With an enhanced user interface, user-friendly controls, and powerful analytical capabilities, KLA / TENCOR / PROMETRIX RS75 is ideal for the most demanding projects.
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