Used KLA / TENCOR / PROMETRIX RS-75 #9396481 for sale

KLA / TENCOR / PROMETRIX RS-75 is a high-end automated wafer testing and metrology equipment designed to meet the needs of the growing semiconductor industry. Its features include a high-precision, multi-axis detector which is capable of inspecting up to 16 wafers simultaneously. The system features a high-resolution inspection and metrology capability, with the option for greater resolution on the inspection side and greater accuracy on the metrology side. KLA RS75 is equipped with a large ring stage that supports a variety of wafers sizes up from 200mm, with a maximum rotation speed of 24 rpm and a maximum scan speed of 13.7mm/s. The detector has built-in intelligence and is capable of identifying defects automatically. In terms of its measurement capabilities, TENCOR RS 75 is equipped with a highly sensitive, multi-axis unit and an array of 33 photomultiplier tube-based detectors. This machine provides detection capabilities with a magnification range from 1X to 4000X. The tool is capable of measuring multiple parameters like surface topography, particle density, line width, surface flatness, optical parameters, CD/x-dimension/y-dimension, contrast, and line-edge/space roughness, as well as critical dimensions for 3D circuit and package die stacks. Additionally, the asset also features pattern recognition software which, when used in combination with its multi-axis measurement model, provides fast, accurate results. KLA / TENCOR / PROMETRIX RS75 utilizes a variety of technologies to ensure high accuracy and repeatability, including automatic surface calibration of the stage, auto-focus detection, and advanced algorithms for line width measurement and pattern recognition. It also features several physical shields to minimize equipment noise and features an integrated particle counter to capture clean-room and sample contamination data. The system is also capable of storing up to 2 million images for inspection and analyzing past and present data for yield improvement, root-cause analysis, and material scrubbing. In addition to its versatile testing and metrology capabilities, TENCOR RS75 also offers a comprehensive suite of software. Its full suite of software offers advanced programming, measurement setup, data processing, and analysis capabilities. It also includes software for viewing and analyzing wafers, overlaying multiple images, and comparing data sets. This software is designed to give engineers the ability to review data quickly and accurately and to conduct real-time analysis. Additionally, as part of the package, RS 75 includes a toolbox of process control applications geared toward semiconductor fabrication needs, such as binning and rapid access to critical process parameters. KLA / TENCOR / PROMETRIX RS 75 is an ideal solution for high-precision wafer testing and metrology for a variety of applications, including high-performance devices and beam-steering MEMS. Its sophisticated detector provides a high-resolution scan unit, while its integrated measurement and data processing tools give engineers the ability to quickly and accurately analyze measurements and access critical process parameters. With its ability to store large amounts of data and its comprehensive suite of software, PROMETRIX RS 75 offers an all-in-one solution for wafer testing and metrology.