Used KLA / TENCOR / PROMETRIX SM 200 #139117 for sale
Wafer Size: 8"
Thin film measurement system, 8" Un-patterned wafers C2C handler 2mm size spot Printer: 3-D Plots Diameter scans.
KLA / TENCOR / PROMETRIX SM 200 is a wafer testing and metrology equipment that offers a comprehensive set of metrology and inspection capabilities, including optical metrology and surface metrology. The system combines an integrated optoelectronic imaging unit, advanced software, and hardware architecture to provide automated, high-throughput inspection and metrology measurements. In addition, the machine features a software-driven environment for simplified operation, maximized data throughput, and user-friendly access to data, resources, and features. The instrument is designed for applications including defect detection, feature sizing, film stress, critical dimension measurements, edge inspection, and wafer scoring. KLA SM 200 offers both2D and 3Dmetrology capabilities designed to meet the needs of numerous wafer manufacturing and wafer test processes. The instrument utilizes advanced imaging and optical technology for increased accuracy, reliability and throughput rate. An integrated LED light source and polarized beam splitter provide optimal illumination for optimised defect detection. Additionally, the tool offers the Flex-LW, a scanning laser alignment tool that works with TENCOR SM 200 to provide an automated method of real-time wafer alignment and adjustment. SM 200 offers an extensive set of tools and parameters to customize test procedures and metrology analysis. An integrated rules-based scripting language helps automate the asset's operation, making it easy to customize tests to meet specific process requirements. A dedicated user interface structure provides access to all of the parameters and settings needed to customize the tests. PROMETRIX SM 200 also offers powerful tools and analysis engines that enable analysis and interpretation of metrology data. The model's image analysis capabilities include statistical process control, autofocus algorithms, and image processing algorithms for automated feature sizing, defect recognition, and high-resolution imaging. The instrument is well-suited for a wide range of applications in the semiconductor industry, including yield enhancement, process improvement, and defect analysis. KLA / TENCOR / PROMETRIX SM 200 is highly compatible with industry-standard software, making it easy to integrate with other data visualization, analytics, and reporting software programs. The instrument can also be used as part of an integrated quality assurance (QA) process or as a standalone equipment for test and measurement applications.
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