Used KLA / TENCOR / PROMETRIX SpectraMap SM 300 #293587919 for sale

ID: 293587919
Film thickness mapping system.
KLA / TENCOR / PROMETRIX SpectraMap SM 300 is a fully integrated wafer testing and metrology equipment designed to rapidly measure a variety of electrical, optical, physical and chemical characteristics of semiconductor device wafers. KLA SpectraMap SM 300 is a powerful tool for the production environment, offering a high degree of accuracy and precision in measurements, flexibility, sophisticated automation, and low operating costs. The system collects data using silicon photonics-based transducers on a wide range of materials, enabling the efficient measurement of thin film optical, electrical, chemical and physical characteristics. The unit is also capable of 2D and 3D mapping of electrical characteristics such as sheet resistance, current density, leakage currents, dielectric breakdown, surface passivation and more. TENCOR SpectraMap SM 300 can detect very small features, even at low signal-to-noise ratios, allowing for improved defect inspection and characterization. PROMETRIX SpectraMap SM 300 offers excellent performance across a range of materials including silicon, gallium nitride, gallium arsenide, silicon germanium, as well as many other types of materials. The machine can measure electrical characteristics such as voltage, current, I-V characteristics, charge, doping, doping concentration, dielectric breakdown and dark saturation current. It can also measure optical properties such as thickness, index of refraction, band gap, absorption length and mechanical properties such as surface roughness, surface cleanliness and adhesion strength. To ensure the accuracy of measurements, the tool is designed with a number of advanced features. These include a Direct Focus Image Sensor (DFIS) coupling unit, allowing for nanometer-level resolution on amorphous and crystalline materials. The asset also incorporates Advanced Semiconductor Metrology (ASM) software for automated feature recognition and results analysis, data management model for easy data retrieval, and low drift voltage source for reducing electrical variability. Finally, the equipment has a wide range of accessories and probes, as well as on-board computer controls, ensuring optimal performance every time. Overall, SpectraMap SM 300 is an advanced wafer testing and metrology system designed to quickly and accurately measure a wide range of electrical, optical, physical and chemical characteristics of semiconductor device wafers. Its smart engineering and sophisticated automation make it an ideal option for production environments, allowing for fast, reliable data collection and comprehensive analysis.
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