Used KLA / TENCOR / THERMA-WAVE 5220Xp #293656107 for sale

KLA / TENCOR / THERMA-WAVE 5220Xp is a wafer testing and metrology equipment that combines powerful optical, mechanical, and electrical test functions for advanced wafer analysis. The main components of the system include an inspection microscope, multi-axis nanopositioners, a microforge module, and a temperature mapping module. The microscope offers inspection and metrology capabilities, allowing for automated observation and measurement of device structures. The multi-axis nanopositioners enable accurate positioning of probes during electrical testing. The microforge module provides precise adjustment of devices during the fabrication process. The temperature mapping module offers the ability to take accurate temperature readings of devices over a range of temperatures. KLA 5220Xp unit utilizes a triple detection imaging machine designed to deliver high-resolution images over a wide range of field angles and magnifications. This is accomplished through the use of a high-resolution objective lens, CCD camera, and charge-coupled device (CCD) detector. The triple detection tool allows for precise alignment of test structures, ensuring precise results and accurate measurements. TENCOR 5220Xp uses a stage automation asset for wafer mapping and alignment. The stage automation model utilizes a linear motor to accurately move the diamond-tipped probe heads, along with a high-precision rotary stage for accurate positioning of test structures. The equipment also utilizes a state-of-the-art, fast scanning, dual laser system to provide high-resolution thermal mapping of test structures. This allows for quick detection and precise quantification of thermal effects, allowing for the precision control of the processing environment. In addition, the unit employs sophisticated in situ electrical testing capabilities. This includes the ability to quickly and accurately measure physical parameters such as resistivity, capacitance, inductance, and frequency response. The machine also includes on-chip testing capabilities for testing at the wafer level. 5220Xp tool is designed to provide manufacturers with the advantage of unparalleled precision and accuracy for their wafer testing, metrology, and inspection operations. It utilizes proven optical, mechanical, and electrical test functions and state-of-the-art temperature mapping and in situ electrical testing capabilities to ensure manufacturers have the capability of performing accurate and precise measurements. This allows manufacturers to have confidence that the test results they are obtaining will be reliable and of the highest quality.