Used KLA / TENCOR / THERMA-WAVE FX 200 #9240151 for sale
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ID: 9240151
Vintage: 2006
Thickness measurement system
Module: User interface
Missing PC
2006 vintage.
KLA / TENCOR / THERMA-WAVE FX 200 is a high-end wafer testing and metrology equipment designed for maximum throughput and accuracy in a variety of semiconductor wafer fabrication processes. This advanced system integrates four sophisticated soldering technologies in one: non-contact optical, contact optical, resistivity, and Shearforce, each capable of gathering essential data about the wafer. KLA FX 200 utilizes modern imaging and optical systems, thermocouples, digital CCD/CMOS (charge-coupled device or complementary metal-oxide semiconductor) cameras, and advanced optics to best analyze semiconductor wafers. TENCOR FX 200 requires specialized software to operate and program certain steps, such as the capture, display, and log the results of each wafer scan. The software utilizes a graphical user interface, allowing for easy navigation and interpretation of the data. This unit also offers extended log book functionality with full record-keeping capabilities. The integrated thermocouple measurement machine allows for confident processing of wafers while exacting temperature control. FX 200 uses several advanced optical technologies for ensuring accurate and precise inspection. This includes a non-contact optical tool for large-scale analysis of the entire wafer; a contact optical asset for mapping spot defects; and shearforce imaging for detailed sub-surface data. In addition, this model also features a resistivity meter to measure resistivity and lifetime. THERMA-WAVE FX 200 equipment offers a number of other features to ensure the utmost accuracy, such as automatic defect mapping, dynamic feature recognition, and automated benchmarking capabilities. It also includes an integrated user-defined quality control system to verify data accuracy and ensure wafer quality. Furthermore, KLA / TENCOR / THERMA-WAVE FX 200 is capable of performing on-the-fly video measurement for creating digital videos of the wafer surface and the fabrication process. Overall, KLA FX 200 is an advanced wafer testing and metrology unit designed to optimize yield, throughput, and accuracy in semiconductor fabrication processes. This comprehensive machine boasts powerful integrated technologies and software to ensure exacting inspection and quality control.
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