Used KLA / TENCOR / THERMA-WAVE J-109 #9209398 for sale
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KLA / TENCOR / THERMA-WAVE J-109 is a state-of-the-art wafer testing and metrology equipment designed for rapid and precise measurements of both electrical and physical properties of semiconductor chips. The system is based on KLA patented Tensor product line and TENCOR Off-Axis Ion Beam Etch (OAIBE) technology. The unit has the capability to inspect wafers up to 200mm in size and to measure electrical parameters such as resistance and capacitance with up to 10nm resolution. The OAIBE capability of the machine enables it to analyze wafers incorporating trenches and vias and to measure depths down to 10nm. For physical properties, KLA J-109 is able to measure critical dimensions such as line width, gate length and contact size with 100nm resolution. The accuracy and repeatability of TENCOR J-109's measurements are made possible through its advanced hardware capabilities such as its 8nm laser interferometer and 14-bit CCD camera, as well as advanced capabilities such as beam deformation compensation and multi-axe scanning. The combination of these features ensures highly precise, repeatable and reliable results. The tool is designed to provide ease of use to both operator and maintenance staff. The user-friendly graphical user interface provides access to a range of useful features such as recipe wizards, recipe sharing and parameter optimization. Maintenance staff have access to a range of tools such as a web-based maintenance portal, a remote maintenance portal and a technician's toolbox. J-109 is a versatile asset designed for a wide range of wafer inspection and metrology applications. It can be used in the research and development of new processes, the monitoring of production processes and the detection and isolation of defective products. The large capacity (up to 200mm wafers) and the high resolution (down to 10nm) capabilities of the model allow it to be used in a wide range of industries including IC fabrication, packaging and test, printed circuit board and wafer printing. Overall, THERMA-WAVE J-109 is a highly advanced, yet user-friendly wafer testing and metrology equipment designed for rapid and precise measurements of both electrical and physical properties of semiconductor chips. Its large capacity (up to 200mm wafers), its high resolution (down to 10nm) and its advanced hardware and software capabilities make it an ideal choice for a wide range of wafer inspection and metrology applications.
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