Used KLA / TENCOR / THERMA-WAVE OP 2600 #293634793 for sale
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ID: 293634793
Vintage: 1997
Film thickness measurement system
Missing parts: Robot and controller
1997 vintage.
KLA / TENCOR / THERMA-WAVE OP 2600 is a wafer testing and metrology equipment designed primarily for use in the semiconductor industry. The system provides simultaneous metrology measurements on up to 12 wafer sites in parallel, allowing for maximum throughput in a small footprint. The unit is capable of performing a wide range of measurements, including stepped profile, line scan, electrical leakage, capacitance and resistivity. The machine's software is user friendly and allows for customizable screens, making it easy to set up and use. KLA OP 2600 is integrated with KLA 2D inspection software, which further provides superior data collection and analysis capabilities. Additionally, the tool is designed to comply with industry standard quality processes, making it suitable for use in front-end and back-end production processes. The asset is powered by TENCOR high speed FlexTech detection model, which uses a patented laser-based platform to accurately detect wafer features and defects. This enables the equipment to measure features as small as 25 nanometers. The system also features a 6 spot optical detector and a precision microscope to ensure accuracy in measurements. The unit has a capacity of 12 150 mm wafers per cycle and is equipped with a universal tweezers-enabled robot for extra flexibility. Additionally, the robot is equipped with 12 independent electron counting channels for maximum wafer throughput. Additionally, the machine is equipped with a wide range of automated features, including automatic wafer verification, focus recognition, alignment and an auto-rescan capability. It is compatible with a range of metrology techniques, including wafer shrinkage, CD/CD variation and Focus/NPDF. The tool's software is designed to enhance process control and reduce time-to-market by integrating process optimization tools and providing real-time feedback on process effectiveness. Additionally, the asset is designed to be highly flexible, offering a number of 3D imaging options and integrating with a variety of other software packages. Overall, TENCOR OP 2600 provides a complete solution for wafer testing and metrology. Its user friendly, customizable software provides an easy to setup platform, while its advanced detection model and wide range of automated features ensure precise and reliable results.
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