Used KLA / TENCOR / THERMA-WAVE OP 2600 #9214771 for sale
URL successfully copied!
Tap to zoom
ID: 9214771
Wafer Size: 8"
Vintage: 1994
Film thickness measurement system, 8"
Multiple layers
Refraction index
Thick and thin film
Extinction coefficient
Reflectivity measurements
(2) Cassette loader stations
Thermoelectrically cooled diode laser: 675 nm
Lamp: Tungsten halogen
Measurements: Multi-layer and multi-parameter on thin ONO & OPO film stacks
Polish slopes: 7 micron x 7 micron
Wafer ranging: 4"-8"
Thick dielectric films
BPR >500A
BPE <500A
Spectrometry
Visible: 450 nm-840 nm
High index films: C-Si, Poly-Si, A-Si
1994 vintage.
KLA / TENCOR / THERMA-WAVE OP 2600 is a high-performance wafer testing and metrology equipment designed to provide accurate and reliable wafer measurements. The system utilizes advanced optics and integrated metrology to quickly and accurately assess the physical characteristics of the wafers, including materials thickness, uniformity, topography, roughness, and other parameters. The unit offers high speed, automated non-contact measurement of wafer thin films and for wafer surface characterizations. It features an automated precision calibration process to ensure accuracy of results, and is equipped with a high-resolution imaging machine to provide maximum resolution of the wafer features. The tool is designed to be user friendly, with an intuitive user interface providing quick operation and data analysis. KLA OP 2600 utilizes a 5-axis stage for accurate 3D nanometer-level measurements and features full-semi-auto mapping capabilities. It can store up to 8 wafers on the automatic loading/unloading process, allowing large volumes of wafers to be tested and measure quickly and easily. The asset can measure wafer topographies at up to 0.5um resolution with nanometer repeatability in 3D dimensions. It also includes a range of specialized metrology software for various measurements and test techniques, such as Advanced Process Control, which provides real-time monitoring of process parameters to ensure optimal Wafer Quality. Additionally, it can be integrated with SPC software to enable further process optimization. TENCOR OP 2600 can be configured with automatic vision tools and/or optical microscopes for defect analysis and inspection, and includes a range of software options for advanced imaging analysis and defect recognition. Additionally, the model can be upgraded with customized parameters to ensure compatibility with industry standards. Overall, THERMA-WAVE OP 2600 is a comprehensive and affordable solution for accurate measurement and analysis of wafer characteristics. It is designed with the most advanced metrology and imaging technology to provide accurate results with a high degree of repeatability and reliability. It is suitable for a range of wafer manufacturing applications and provides an efficient solution for quality control and process optimization.
There are no reviews yet