Used KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600 DUV #293638070 for sale
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ID: 293638070
Vintage: 1996
Film thickness measurement system
Hard Disk Drive (HDD)
Missing parts:
(2) DUV Parts: Monochromator and accessory
Robot arm
Cover
1996 vintage.
KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600 DUV is a highly advanced wafer testing and metrology equipment designed to provide the highest levels of accuracy and performance in the semiconductor industry. KLA OPTIPROBE 2600 DUV offers unbeatable inspection and measurement capabilities with superior data quality and throughput. The advanced wafer testing and metrology system utilizes a cutting edge dual-beam interferometer combined with an ultra-precisecontact probe. Built as a fully automated, closed-loop metrology unit, TENCOR OPTIPROBE 2600DUV allows for direct control of the probe position and environment, ensuring repeatable and consistent measurement results. For inspecting the surface of a wafer in great detail, the advanced machine features a high resolution contact probe scanning tool. The probe is designed to scan the whole wafer surface quickly and accurately, enabling users to inspect the entire wafer or perform localized probing at the same time. Equipped with a redundant shear/tilt stage and ultra-precise air bearing, the asset provides uncompromising repeatability and accuracy. The detector equipped dual-beam interferometry capability allows for advanced phase shifting techniques and up to four diffraction grating wavelengths. This provides users with unmatched measurement data quality, enabling them to measure and track the device flatness, non-uniformity and other critical attributes quickly and easily. The model also includes a camera-based focus correction equipment and an advanced defect detection system with various inspection modes to match specific application needs. For fast and efficient wafer loading and handling, KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600DUV includes a motorized stage for automated wafer loading. The stage has two configurations for both single- and double-side wafers, offering excellent wafer retention and manipulation. The unit is also capable of automatic wafer ID recognition which makes loading process even faster and more efficient. Overall, KLA OPTIPROBE 2600DUV is an industry leading wafer testing and metrology machine and offers advanced features and precision performance. By combining the advanced features and high resolution contact probe scanning with the dual-beam interferometry capabilities, the tool is capable of delivering outstanding data quality and repeatability. The fully automated features, fast loading time and advanced defect detection capabilities enable users to accurately analyze specimen samples and measure critical attributes with unprecedented speed and precision.
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