Used KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600 DUV #9200133 for sale

ID: 9200133
Thickness measurement system.
KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600 DUV is a wafer testing and metrology equipment designed for advanced deep ultraviolet (DUV) imaging and inspection. It offers improved process control, yield, and time-to-market for leading-edge production of semiconductor devices. KLA OPTIPROBE 2600 DUV system combines advanced optics with an all-reflective, telefocused imaging and spectroscopic microscope unit, giving it a combination of high resolution, high throughput, and higher than average dynamic range. This gives it superior image quality and dynamic range for difficult imaging applications, such as those requiring low-level inspections and overlay. The machine is also equipped with an advanced optical engineering package, which offers high-performance optics on a flightcase base. It features low-vibration design for quick setup and fast changeovers, an optimized optical path, and an advanced multi-axis positioner tool. The asset also contains a number of advanced metrology capabilities, which are designed to maximize process control and yield improvement. It includes: Automated wafer metrology, comparable to full-field systems, but with enhanced versatility due to its array of process monitors. Localized metrology, enabling metrology operations on targeted areas of the wafer with increased accuracy and speed. Dynamic focus-tracking algorithms, which provide better image quality and improved precision in device features. An integrated high-performance imaging, which facilitate the transfer of images between the model and other analytical tools for further resolution and clarity. TENCOR OPTIPROBE 2600DUV equipment is an ideal solution for advanced DUV imaging and inspection, and can provide highly efficient processing that helps to maximize yield and time-to-market for critical semiconductor applications. It offers exceptional image quality and dynamic range along with advanced metrology capabilities for a wide range of processes, and is a powerful tool for ensuring quality, yields, and cost-effectness.
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