Used KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600 DUV #9212839 for sale
Wafer Size: 8"
Thickness measurement system, 8" Upgraded SBC to Pentium III 600 MHz Measurement tool: BPR, BPE, VAS + DUV 1996 vintage.
KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600 DUV is a wafer testing and metrology equipment designed for advanced semiconductor device research and manufacturing. This leading-edge system utilizes state-of-the-art optical technologies to inspect and analyze wafers during the fabrication process. It provides precise measurements of dielectric thickness, topography and other detailed structures on the wafer surface. KLA OPTIPROBE 2600 DUV is a highly-integrated unit designed with an efficient, compact footprint, ideal for both cleanroom and production line environments. It is equipped with dynamic focus optics and an automated transport machine, allowing for fast, accurate measurements. The tool also features a proprietary patented integrated imaging detector technology to capture high-resolution images in record speeds. The asset supports a wide range of applications related to wafer surface metrology, including non-destructive dielectric thickness, topography, optical constant, residual thickness, surface roughness, geo-metric parameters, film stress and 3D line/space morphometry measurements. It provides critical feedback which helps engineers and product managers identify manufacturing problems and solve them promptly. TENCOR OPTIPROBE 2600DUV is the first model that supports extreme UV (EUV) lithography measurements, making it an indispensable tool for advanced semiconductor device research and fabrication. It is designed to have an automated calibration equipment, utilizing laser interferometry and artifact samples to ensure reliable and repeatable measurements. This top-of-the-line system is able to perform complex measurements with maximum speed and accuracy, making it an essential tool in the modern semiconductor device research and production process. The robust automation subsystem, efficient operation and high accuracy make OPTIPROBE 2600 DUV an ideal solution for manufacturing peak-performance semiconductor products.
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