Used KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600B #9220002 for sale
Wafer Size: 8"
Film thickness measurement system, 8" 1997 vintage.
KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600B is a high-grade metrology tool designed to provide users with accurate, repeatable test and measurement of critical parameters on semiconductor wafers. This advanced equipment can measure a variety of complex device structures, such as high aspect ratio 3D devices, in real-time over a wide range of operating temperatures. This comprehensive testing system includes two camera heads that can handle wafer sizes from 8 to 200 mm with a sampling rate of up to 25 microns, enabling quick and accurate detection of even the smallest changes. In addition, the proprietary Opti-Gallium Indium-Arsenide (GaAs) laser backscatter technology provides fast and accurate interrogation of devices for advanced multi-layer/multi-gate structure measurements. KLA OPTIPROBE 2600B also features integrated metrology tools to support a wide variety of tests and measurements, including critical dimension measurements, critical height profile measurement, localization, layout, overlay and overlay flatness. This unit can also perform multiple high-resolution optical measurements, including BSI (bottom-side inspection) and SEM/FIB. The advanced KLA motorized probe station is designed to allow for precise alignment of the wafer and multiple test points can be measured in seconds. Furthermore, TENCOR OPTIPROBE 2600B utilizes a graphical user interface that provides access to the full suite of testing and measurement capabilities, allowing users to easily set up and customize test programs. Additionally, this machine can be controlled remotely from a secure, cloud-based web service, and can be connected to a variety of popular software packages for advanced data analysis. THERMA-WAVE OPTIPROBE 2600B is built for precision and accuracy, providing users with a powerful and reliable tool for semiconductor testing and metrology. With its diverse feature set, speedy performance, and secure remote access capabilities, OPTIPROBE 2600B is the ideal solution for advanced wafer testing and metrology.
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