Used KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600B #9220005 for sale
Wafer Size: 8"
Film thickness measurement system, 8" 1996 vintage.
KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600B wafer testing and metrology equipment offers advanced capabilities for a wide range of wafer testing and metrology applications including process development, monitor and control, fault detection, defect identification, data collection, wafer-level prognostics, yield improvement, and wafer-level analysis. This system features a highly flexible, scalable, and configurable design capable of working with a variety of substrates including silicon, germanium, gallium arsenide, indium phosphide, and others. It also supports wafers up to 200mm in diameter with an accuracy of 10µm. KLA OPTIPROBE 2600B consists of a compact, mass-market form factor designed to make testing and metrology activities easier, faster, and less expensive. Unit components include an Intended-Debug subsystem, test pattern automation, and a comprehensive suite of testing tools. The Intended-Debug subsystem provides detailed analysis of individual wafers with features such as circuit defect localization, circuit parameter optimization, and fault analysis. The test pattern automation simplifies optimization of the test patterns used for metrology and calibrational tests to obtain the best results. In addition, TENCOR OPTIPROBE 2600B includes a comprehensive range of testing tools such as XY stage movement, probe scanning, digital human machine interface (HMI), fuzzy logic processor, and various others. OPTIPROBE 2600B features an advanced scan-set acquisition machine that offers up to three concurrent non-overlapping scans to eliminate the time spent while exchanging wafers and test probes. It also offers up to 12 simultaneous positioning axes with precision reaching +/ - 1 micron, and onboard nonlinear compensation for xy, z, and theta axis testing steps. All of the measurement results are captured using the Matlab data recorder, allowing for easy transfer of the data into a spreadsheet or other analysis program. Furthermore, THERMA-WAVE OPTIPROBE 2600B comes with an embedded database, which makes it easier to manage, archive, and compare results over a longer period of time. Overall, KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600B wafer testing and metrology tool is a powerful, versatile, and reliable tool that can be used for a variety of wafer testing and metrology applications. Its comprehensive range of features and functions will help streamline the development, control, and analysis of large wafers. It also provides users with up to 12 simultaneous positioning axes for accurate measurements, and an integrated nonlinear compensation asset for smooth and precise results. The built-in Matlab data recorder and the onboard database make it easy to manage, archive, and compare data over long periods of time. With the high accuracy and flexibility offered by KLA OPTIPROBE 2600B, users can ensure reliable testing and metrology results from every wafer manufactured.
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