Used KLA / TENCOR / THERMA-WAVE OPTIPROBE 5240 #293729349 for sale
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ID: 293729349
Wafer Size: 8"
Film thickness measurement system, 8"
Beam Profile Reflectometry (BPR)
Beam Profile Ellipsometry (BPE)
Deep Ultra-Violet Broad-Band Reflectometer (DUV)
Absolute Ellipsometer (AE)
Spectroscopic Ellipsometer (SE)
Hard Disk Drive (HDD).
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