Used KLA / TENCOR / THERMA-WAVE Optiprobe 5340 #9399017 for sale
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KLA / TENCOR / THERMA-WAVE Optiprobe 5340 is a wafer testing and metrology equipment designed for high accuracy, throughput and flexibility. The system provides best-in-class performance for advanced metrology and defect detection applications. It is capable of automated wafer-to-wafer alignment and non-contact, large-field optical imaging, providing a non-destructive view of each wafer's surface in order to identify defects, analyze and measure critical properties. KLA Optiprobe 5340 is equipped with an advanced metrology stage, providing fast, precise wafer alignment and high-precision scanning. The unit allows for pre-alignment of multiple substrates, so that a map of the entire wafer can be created in the shortest possible time. The machine also features a wide variety of test and measurement instruments, including light microscopes, CCD cameras and spectrographs, for use in advanced wafer mapping and analysis. TENCOR Optiprobe 5340's optical platform provides unsurpassed performance for imaging, defect detection and mapping. Multicolor imaging technology is used for fast, accurate wafer mapping and feature characterization. High-resolution filters and microscopes provide an up to 30x increase in resolution compared to conventional systems, allowing for detailed inspection and analysis of each wafer. The tool also features an advanced thermal inspection asset, providing rapid, non-contact infrared imaging. A variety of thermal probes and lenses can be used to inspect each wafer, allowing for rapid defect localization and analysis. Finally, THERMA-WAVE Optiprobe 5340's automated metrology model includes a range of software algorithms for wafer comparison and analysis. Sophisticated algorithms are used to quickly and accurately identify common defects in a given wafer and can pinpoint areas with suspicious defects that may require further inspection. By providing access to sophisticated defect analysis algorithms, Optiprobe 5340 is ideal for complex metrology and verification tasks.
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