Used KLA / TENCOR / THERMA-WAVE Spectra FX 200 #293652610 for sale

KLA / TENCOR / THERMA-WAVE Spectra FX 200 is a wafer testing and metrology equipment that combines accurate, high-speed wafer scanning with dedicated metrology tools. It utilizes advanced CCD sensors in its optical system to ensure accurate wafer scanning, and is designed for testing and metrology of 200 mm (8-inch) and 300 mm (12-inch) wafers. KLA Spectra FX 200 is capable of performing two-dimensional and three-dimensional metrology on a wide range of wafer thicknesses, materials, and patterns. This includes critical dimension (CD) measurements, etch depth measurements, and overlay measurements. It has the ability to detect multiple layers of features on wafers, and can also measure particle sizes and chemistry contaminants. TENCOR Spectra FX 200 utilizes a patented lower pressure generation unit for high-resolution measurements, which allows for the ability to track small changes in wafer properties with great accuracy and resolution. This machine also allows for real-time feedback control of the scanning process. It features an advanced computer-controlled stage for fast, accurate wafer positioning. THERMA-WAVE Spectra FX 200 offers a variety of different optional components, including an automated substrate loader, a sample transfer robot, liquid cooling for higher scan speeds, an inline mapping station, and integrated gas controls. It can be integrated with several different microscopes, including focused ion beam and scanning electron microscopes. Additionally, Spectra FX 200 tool is equipped with a powerful PC-based software package that allows for easy setup and operation. Overall, KLA / TENCOR / THERMA-WAVE Spectra FX 200 is a powerful and versatile wafer testing and metrology asset. It offers accurate, high-speed scanning capabilities while providing multiple layers of feature detection and a wide range of optional components. The model is easy to integrate with other microscopes, and is equipped with a powerful PC-based software package that simplifies setup and operation.