Used KLA / TENCOR / THERMA-WAVE Spectra FX 200 #9309105 for sale

KLA / TENCOR / THERMA-WAVE Spectra FX 200
ID: 9309105
Wafer Size: 12"
Film thickness measurement system, 12".
KLA / TENCOR / THERMA-WAVE Spectra FX 200 is a wafer testing and metrology equipment that provides comprehensive analysis to accurately and reliably test and measure semiconductor device performance. This system incorporates several advanced technologies to understand the physical characteristics of a wafer that can be used to understand electrical performance. KLA Spectra FX 200 contains a programmable stage motion unit that is capable of scanning the entire wafer quickly and accurately, equipped with two motors for precise control and a high-resolution encoder for position detection. Additionally, the machine includes high-resolution imaging, chemometric analysis, and defect characterization capabilities for accurate wafer inspection. Advanced optics in TENCOR Spectra FX 200 enable imaging capture of features as small as 2 µm, along with the capability to create topography maps of the wafers surface. The tool uses high-powered laser metrology based on thermography to quickly and accurately measure nanoscale features on the wafer. By using this advanced technology the user can measure layer thicknesses, aspect ratios, and more. Additionally, the chemometric capabilities of the asset provide metrology of layer height, composition, and defect analysis with unrivalled accuracy. Spectra FX 200 provides analysis tools with an unparalleled level of accuracy and reliability. These analysis tools enable users to collect the data needed to understand the electrical and physical performance of semiconductor devices, and interpret results with high confidence. Additionally, extended connectivity and convenient input and output functions make data transfer to other systems, databases, and companies easier than ever. THERMA-WAVE Spectra FX 200 is designed with safety, security, and cost-effectiveness in mind. This advanced model is equipped with a variety of protection mechanisms to ensure safe operation and protection from outside influence. Additionally, a variety of features such as maintenance-free inlet air purification, reliable air scouring, and automatic internal and external temperature control minimize costs while maximizing energy efficiency. This advanced technology from KLA provides an efficient and reliable way to test and measure semiconductor devices. From its precise motion control and high-resolution imaging to its thermography and chemometric capabilities, KLA / TENCOR / THERMA-WAVE Spectra FX 200 provides comprehensive analysis with an unmatched level of accuracy and reliability.
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