Used KLA / TENCOR / THERMA-WAVE Spectra-Shape 8660 #293591665 for sale

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ID: 293591665
Wafer Size: 12"
Vintage: 2013
Optical review system, 12" Process: Scatter (3) Load ports Robot / Stage controller FOUP opener: SINFONIA EMO Recessed Panel interlock Power cable: 3m Does not include: Hard Disk Drive (HDD) Power supply: 200 VAC, Single phase 2013 vintage.
KLA / TENCOR / THERMA-WAVE Spectra-Shape 8660 is a premier wafer testing and metrology equipment designed for quality control in a variety of semiconductor industry applications. It offers a range of wafer metrology tools, from laser vector and diffraction pattern analysis to radiometry analysis, to accurately measure and compare parameter values to consistent and repeatable results. KLA Spectra-Shape 8660 offers a large variety of measurement capabilities. It uses laser vector scanning and diffraction pattern analysis to obtain surface topography information from wafer samples and provides extremely accurate quantitative analysis to evaluate changes in surface features such as surface roughness, grain boundaries, relief features, flatness, etc. In addition, TENCOR Spectra-Shape 8660 also offers a wide range of radiometry capabilities which can determine absolute optical reflectance levels of certain surfaces. The performance of Spectra-Shape 8660 is extraordinary; it utilizes a motion stage that gives ultra-precise motions in the x and y direction, a wavelength range of up to 30 nm, a system of optical lenses, and a specially designed imaging chamber to keep its readings accurate. Additionally, its optics are designed to reduce thermal contrast and its scanning stage is designed to provide a smooth motion even with samples that are not perfectly flat. The unit offers several different user-friendly interfaces with comprehensive diagnostics, alarm features, and automatic scan parameters that allow for ease of use and simple set-up during routine measurements. Furthermore, THERMA-WAVE Spectra-Shape 8660 also has a variety of statistical analysis options, automated calibration routine and measurement procedures, trend analysis capabilities, integrated image contrast and filtering tools, along with an easy to use GUI. KLA / TENCOR / THERMA-WAVE Spectra-Shape 8660 is a top of the line wafer testing and metrology machine that can accurately measure a variety of features with high accuracy. Its state of the art design and sophisticated software offers fast, reliable measurements and the ability to quickly compare parameter values with consistent and repeatable results. This tool is an extremely valuable tool for semiconductor quality control and production.
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