Used KLA / TENCOR / THERMA-WAVE Therma-Probe 630 #9399013 for sale

KLA / TENCOR / THERMA-WAVE Therma-Probe 630
ID: 9399013
Wafer Size: 12"
Implant dosing measurement system, 12".
KLA / TENCOR / THERMA-WAVE Therma-Probe 630 is a wafer testing and metrology equipment used to inspect wafer substrates and coatings, enabling manufacturers to ensure compliance with customer specifications. This advanced system uses multiple temperature-sensing thermocouples to measure and control temperatures within a few degrees Celsius, with an accuracy of ±0.2 °C. KLA Therma-Probe 630 features state-of-the-art electronics, servo controls, and data acquisition technology to facilitate precise, repeatable testing of multiple substrates. This innovative unit can detect both surface and subsurface flaws in wafer substrates, making it a powerful tool for defect analysis. TENCOR THERMAPROBE 630 also assesses changes in optical properties associated with substrate damage, helping to detect weak characteristics and reveal surface change. The user-friendly THERMA-WAVE THERMAPROBE 630 is equipped with an ergonomically designed user interface, allowing operators to perform wafer testing and metrology at any point in the production process. The intuitive interface is designed for intuitive operation and rapid set-up, providing quick and easy access to machine functions and results. Moreover, THERMA-WAVE Therma-Probe 630 supports a wide range of test modes, enabling it to accommodate various test parameters with ease. This includes precision measurements of optical density, temperature, and thickness, as well as tests for surface roughness and uniformity. With THERMAPROBE 630, users can set test parameters based on the customer's specific requirements. Innovative features of Therma-Probe 630 include high-resolution wafer imaging technology, leading-edge laser interferometers, precision thermal heating, and static or dynamic analysis of data. This provides users with repeatable, reliable results, ensuring optimum quality control testing of substrates and coating. From specific usability considerations to long-term performance, KLA / TENCOR / THERMA-WAVE THERMAPROBE 630 offers unparalleled accuracy, reliability and repeatability.
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